Program overview

WEDNESDAY MORNING, 6 OCTOBER 1999

10:15 GW1.01 Experimental and theoretical investigations of ionization mechanisms in air plasma discharges at atmospheric pressure

C. Laux, L. Yu, D. Packan, L. Pierrot, C. Kruger, R. Zare (Stanford University, Stanford, CA 94305)

10:30 GW1.02 Detection of CH in an expanding Ar/acetylene plasma using Cavity Ring Down Absorption Spectroscopy

Richard Engeln (CPS, Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands), Karine Letourneur, Maarten Boogaarts, Richard van de Sanden, Daniel Schram, CRD on expanding plasmas Team

10:45 GW1.03 Temporal Electron Relaxation in Nonisothermal, Collision-Dominated Plasmas Acted Upon by Static Electric and Magnetic Fields

Detlef Loffhagen, Rolf Winkler (Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, Germany)

11:00 GW1.04 Electron Dynamics in Electric Fields with Spherical and Cylindrical Symmetry

Hiroyuki Date (College of Medical Technology, Hokkaido University), Peter Ventzek (Motorola Inc.), Kei-ichi Kondo (Anan College of Technology), Mitsuo Shimozuma (College of Medical Technology, Hokkaido University), Hiroaki Tagashira (Muroran Institute of Technology)

11:15 GW1.05 Wafer Temperature Calculation with Ion Bombardment Heating Effects

Han-Ming Wu, Jack E McInerney (Novellus Systems, Inc.)

10:15 GW2.01 Introduction to the Session in Honor of Will Allis

Mark J. Kushner (University of Illinois, Dept. of Electrical and Computer Engr., Urbana, IL, 61801, USA)

10:45 GW2.02 Resonance Radiation Transport in Low Pressure Discharges

J. E. Lawler (U. of Wisconsin)

11:00 GW2.03 Recent Developments in Modeling and Diagnostics of Fluorescent Lamp

Graeme Lister (OSRAM SYLVANIA INC.)