TUESDAY MORNING, 5 OCTOBER 1999

Session AT1. Electron-Molecule Collisions.

08:00 AT1.01 Ultralow Energy Electron Attachment at Sub-Millielectron Volt Resolution: Ara Chutjian (Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA)
08:30 AT1.02 Dissociative Attachment in Chlorine-substituted Hydrocarbons: Paul D. Burrow (University of Nebraska-Lincoln, Lincoln, NE 68588.)
09:00 AT1.03 Theoretical Study of the Effects of Nuclear Motion on Low-Energy Electron-CO_2 Scattering: W.A. Isaacs (LBNL), T.N. Rescigno (LLNL), C.W. McCurdy (LBNL)
09:15 AT1.04 Ubiquitous Low Energy Structures in Differential Elastic Electron Molecule Scattering: Stephen J. Buckman, Lewis T. Chadderton (Atomic and Molecular Physics Laboratories, Australian National University, Canberra.)
09:30 AT1.05 Absolute Elastic Electron Scattering from Benzene: Robert Gulley, Stephen Buckman (Australian National University)
09:45 AT1.06 Low Energy Dissociative Electron Attachment to Ozone: Gilbert Senn (Institute of Ion Physics, University of Innsbruck), Jan Dusan Skalny (Department of Plasma Physics, Comenenius University, Bratislava), Aleksandar Stamatovic (Faculty of Physics Beograd), Nigel Mason (University College London), Paul Scheier, Tilmann Märk (Institute of Ion Physics, University of Innsbruck)

08:00 AT2.01 Modulated Discharges in Processing Applications: A. E. Wendt, S.-B. Wang (Univ. of Wisconsin - Madison), J. Werking (SEMATECH)
08:30 AT2.02 Low Frequency Inductive Discharges: Valery Godyak (OSRAM Sylvania, 71 Cherry Hill Drive, Beverly, MA 01915)
09:00 AT2.03 ICP Reactor Modeling: CF4 Discharges: Deepak Bose (Thermosciences Institute), T.R. Govindan, M. Meyyappan (NASA Ames Research Center)
09:15 AT2.04 Two-dimensional Experimental Characterization of an Inductive Discharge and Comparison to a Kinetic Plasma Model using Parallel Computing: Uwe Kortshagen, Brian Heil (Mechanical Engineering, University of Minnesota, MN 55455)
09:30 AT2.05 The Influence of Antenna Configuration and Standing Wave Effects on Density Profile in a Large Area Inductive Plasma Source: Yaoxi Wu, M. A. Lieberman (University of California at Berkeley)
09:45 AT2.06 Determination of Species Concentrations and Temperatures in Chlorine Inductively Coupled Plasmas: Mikhail V. Malyshev, Vincent M. Donnelly, Nicholas C. M. Fuller, Katherine H. A. Bogart (Bell Laboratories, Lucent Technologies), Irving P. Herman (Columbia University)