Program overview

THURSDAY MORNING, 9 OCTOBER 1997

08:00 PR1.01 New Results in Electron-Atom Ionization

Don Madison (University of Missouri-Rolla)

08:30 PR1.02 Electron Impact Mass Spectrometric Study of Li vapor

S.K. Srivastava, Ione Iga (Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA 91109, USA)

08:45 PR1.03 Differential Electron Scattering from Metastable Helium

Stephen J. Buckman (Atomic and Molecular Physics Laboratories, Australian National = University)

09:15 PR1.04 Measurement of electron impact excitation cross sections out of the metastable levels of argon

John B. Boffard (University of Wisconsin-Madison)

09:30 PR1.05 Electron-Impact Excitation Cross Sections of Argon and Xenon: A Detailed Investigation of the Pressure Dependence (Supported by the Air Force Office of Scientific Research and by the U.S. Dept. of Commerce, NIST.)

John T. Fons, J. Ethan Chilton, Paul Rugheimer, Chun C. Lin (University of Wisconsin-Madison)

09:45 PR1.06 Long-Time Stability of Superexcited High Rydberg Molecular States

Yifei Zhu (), Lal Pinnaduwage (Oak Ridge National Laboratory and University of Tennessee, Knoxville)

08:00 PR2.01 Modeling the Transitions from Capacitive to Inductive to Helicon RF Discharges

M. A. Lieberman (University of California, Berkeley), R.W. Boswell (The Australian National University, Canberra)

08:15 PR2.02 Ion Fluxes and Velocity Distributions in an ECR Discharge Plasma

Glenn Joyce, Martin Lampe, W. M. Manheimer, Steven P. Slinker (Naval Research Laboratory)

08:30 PR2.03 Absolute density measurement of FCN in CHF_3 ECR plasma etching of Si_3N_4

Koji Miyata, Hiroyoshi Arai, Masafumi Ito, Masaru Hori, Toshio Goto (Department of Quantum Engineering, Nagoya University, Japan)

08:45 PR2.04 Langmuir probe measurements in the Hollow Cathode Magnetron

Mirko Vukovic, Kwok-Fai Lai (Novellus)

09:00 PR2.05 Development of a surface-wave magnetoplasma sputtering source for the elemental analysis of solid samples

Louis-Philippe Masse, Joelle Margot (Dept de Physique, Universite de Montreal, Montreal, Quebec, Canada), Joseph Hubert (Dept de Chimie, Universite de Montreal, Montreal , Quebec, Canada)

09:15 PR2.06 Study of Ar and Cu Plasma in a Magnetic Field Enhanced rf Argon Plasma for Ionized Sputtering of Cu

W Wang, J Foster, A Wendt, J.H Booske, S.S Gearhart, N Hershkowitz (UW-Madison)

09:30 PR2.07 Dynamics of Three-Dimensional DC Magnetron Discharge Plasma

K. Nanbu, S. Kondo (Tohoku University)

09:45 PR2.08 Spatially Resolved DC Bias Over A High-Powered M.E.R.I.E. Cathode

R.A. Lindley, K.-H. Ke, K. Doan, H.C. Shan (Applied Materials, Inc.)