Session DMP1 - Poster Session: Electron-Molecule Collisions.
INVITED session, Monday afternoon, October 06
Great Hall, Memorial Union
We have used the Schwinger multichannel method to calculate elastic and inelastic cross sections for low-energy electrons colliding with the fluorocarbon gases C_2F_6 and c-C_4F_8, which are used extensively in plasma etching of semiconductors. Elastic cross sections show multiple shape resonances that can be classified by symmetry on the basis of the present calculations. Together with studies of excited-state potential energy surfaces, the inelastic cross sections provide information on the dissociation of these molecules following electron--impact excitation. We analyze the relation between our results and available measurements of the elastic, total, ionization, and neutral-dissociation cross sections.