Program overview

WEDNESDAY MORNING, 23 OCTOBER 1996

08:00 W1A.01 Recent Developments in Silicon Ion Beam Epitaxy

J. Wayne Rabalais (Department of Chemistry, University of Houston, Houston, TX 77204-5641)

08:30 W1A.02 Surface Modification with Low Energy Polyatomic Ions

Luke Hanley (University of Illinois at Chicago)

09:00 W1A.03 Measurements and Modelling of Sputtering Rates with Low Energy Ions

David N. Ruzic, Preston C. Smith, Robert B. Turkot Jr. (University of Illinois)

W1A.04 Secondary Electron and Negative Ion Emission from Oxidized Aluminum

John C. Tucek, Roy L. Champion (Department of Physics, College of William and Mary, Williamsburg, VA 23187)

W1A.05 Energy and Angle Distributions of Ions Reflected from Chlorinated Silicon Surfaces

Bryan Helmer, David Graves (University of California, Berkeley, CA)

08:00 W1B.01 Microwave Plasma Enhanced Synthesis of Nanocrystalline Diamond Films*

Dieter Gruen (Argonne National Laboratory, Argonne, IL 60439)

08:30 W1B.02 Reaction Mechanisms for Growth of Diamond Thin-Films from Buckyball Precursors

Larry Curtiss (Argonne National Lab, Argonne, IL)

09:00 W1B.03 Diamond Nucleation and Growth by Chemical Vapor Deposition

John Angus (Chemical Engineering Department, Case Western Reserve University Case Western Reserve University, Cleveland, OH 44106-7217)

09:30 W1B.04 Deposition of Diamond-Like Carbon Film Using RF Plasma Enhanced CVD foran Anti-Reflection Layer on Polarizers in TFT LCD Display

Y.K. Lee, K.C. Park, K.W. Lee, Y.K. Lee, J.W. Lee, H.B. Lee, K.B. Kim (Image and Media Lab. LG Electronics Inc., Woomyeon-Dong 16, Seocho-Gu, Seoul, Korea)

09:45 W1B.05 Heavy-Ion Radiation-Induced Diamond Formation in Carbonaceous Materials

T. L. Daulton (Argonne National Lab., Argonne IL), M. Ozima (U. of Tokyo, Bunkyo-Ku, Tokyo 113, JAPAN)

10:30 W2A.01 Models of Gas-phase and Surface Chemistry for Plasma Enhanced Chemical Vapor Deposition

Ellen Meeks (Sandia National Laboratories)

11:00 W2A.02 Optimization of PECVD Chamber Cleans Through Fundamental Studies of Electronegative Fluorinated Gas Discharges.

John Langan (Air Products and Chemicals, Inc., Allentown, PA.)

11:30 W2A.03 Deposition of ultrahard coatings in a plasma environment

C. Doughty (Oak Ridge National Laboratory, Oak Ridge TN, 37831)

12:00 W2A.04 Simulation of Ionized Copper Deposition in a Magnetron Sputter-Inductively Coupled Plasma Reactor

Michael J. Grapperhaus, Mark J. Kushner (University of Illinois, Urbana, IL)

12:15 W2A.05 Design of a Sputtering Cathode for Binary Alloys Deposition in Plasma Source Ion Implantation

Shamim Malik, Robert Breun, Paul Fetherston, Kumar Sridharan, John Conrad (University of Wisconsin-Madison)

W2B.01 Cross Section Results for Electron Excitation out of the 2^3S Level of Helium

Garrett A. Piech, John B. Boffard, Mark E. Lagus, L.W. Anderson, Chun C. Lin (University of Wisconsin, Madison)

W2B.02 Measurement of Electron Impact Excitation Cross Sections out of the metastable levels of Argon

John B. Boffard, Garrett A. Piech, Mark F. Gehrke, Mark E. Lagus, L.W. Anderson, Chun C. Lin (University of Wisconsin-Madison)

W2B.03 Measurement of Cross Sections for Electron-Impact Excitation of Argon by Fourier Transform Spectroscopy

J. Ethan Chilton, John B. Boffard, Chun C. Lin (University of Wisconsin, Madison)

W2B.04 Superelastic Scattering from Metastable State-Selected Rare-Gas Atoms.

B.G. Birdsey, H. Batelaan, M.E. Jhonston, T.J. Gay (University of Nebraska, Lincoln, NE 68588-0111)

W2B.05 Measurement of Electron Impact Excitation Cross Sections of the Xenon Atom at Various Pressures

John T. Fons, J. Ethan Chilton, Sunggi Chung, Chun C. Lin (University of Wisconsin, Madison)

W2B.06 Electron Impact Excitation of the 3d^94s^[2

V Suvarov, P.J.O. Teubner (Dept. of Physics, The Flinders University of South Australia, GPO Box 2100, Adelaide, Australia, 5001)

W2B.07 Studies of Dissociative Recombination Final Product States in a Argon Glow Discharge.

Carlos Avila, Gessler Hernandez, J.W. Sheldon, K.A. Hardy (Physics Department, Florida International University), J.R. Peterson (SRI International)

W2B.08 Absolute differential and integral cross sections for electron impact excitation of the A^2\Sigma^+, b^4\Sigma^-, C^2\Pi and D^2\Sigma^+ electronic states of NO

M.J. Brunger, P.J.O. Teubner, B. Mojarrabi, L. Campbell, M. A. Green (Dept. of Physics, The Flinders University of South Australia, GPO Box 2100, Adelaide, Australia, 5001), D.C CartwrightJ (Theoretical Divisions, Los Alamos National Labs, Los Alamos, New Mexico, USA, 87545)

W2B.09 Future opportunities for experimental and theoretical studies into low energy electron-molecule scattering processes.

S. J. Buckman (MElectron Physics Group, Australian National University, Canberra, ACT, Australia, 0200), M. J. Brunger (Physics Dept., Flinders University of SA, GPO Box 2100, Adelaide, SA, Australia, 5001)

13:30 W3A.01 The Physics and Potential Development of Inductively Coupled Reactors

John H. Keller (IBM, Bldg. 630-EL1, Hopewell Jct., NY 12533)

14:00 W3A.02 Investigation of Asymmetries in Inductively Coupled Plasma Etching Reactors Using a 3-Dimensional Hybrid Model

Mark J. Kushner, Michael J. Grapperhaus (University of Illinois, Urbana, IL 61801)

14:15 W3A.03 Capacitive Effects in Inductively Coupled Plasma Reactors

Peter Vitello, Nicholas Tishchenko, Gergory Parker (LLNL, Livermore, CA), Michael Branch (Applied Materials, Santa Clara, CA)

14:30 W3A.04 Simulations of Feedback Control Schemes for Inductively Coupled Plasma Sources

Naoki Yamada, Peter L.G. Ventzek, Y. Sakai (Hokkaido University, Dept. of Elect. Eng., Sapporo 060 Japan), H. Date (Hokkaido University, College of Med. Tech., Sapporo 060 Japan), H. Tagashira, K. Kitamori (Hokkaido Institute of Technology, Sapporo 065 Japan)

14:45 W3A.05 Inductive Electron Heating Revisited

Michel Tuszewski (Los Alamos National Laboratory, Los Alamos, NM 87544)

15:00 W3A.06 Influence of magnetic field on the structure in ICP(-Modeling and CT measurement-)

T. Makabe, K. Iyanagi, A. Okigawa, N. Nakano (Keio University, Yokohama)

15:15 W3A.07 A Comparative Study of Models for Non-Collisional Heating in Inductively Coupled Plasmas

Shahid Rauf, Mark J. Kushner (University of Illinois, Urbana, IL 61801)

15:30 W3A.08 "Politically-Incorrect" Electron Behavior in Low Pressure RF Discharges

Valery Godyak (OSRAM SYLVANIA INC), Vladimir Kolobov (Univ. of Houston, Houston TX)

13:30 W3B.01 Radio-Frequency Discharges at Moderate Pressures and CO2-Lasers with RF Excitation

Yuri Raizer (Dept Physical Gasdynamics of The Institute for Problems in Mechanics Russian Acad.Sci)

14:00 W3B.02 Plasma Ionization Dynamics of Energy Beam Ablation of Materials

R.M. Gilgenbach (Intense Energy Beam Interaction Laboratory, Nuclear Engineering and Radiological Sciences Dept., University of Michigan, Ann Arbor, MI 48109-2104)

14:30 W3B.03 Dynamics of Laser Ablation Plasmas in Vacuum and Background Gases: Effects of Scattering and Interplume Collisions on Velocity Distributions used for PLD Film Growth

David Geohegan (Solid State Division, Oak Ridge National Laboratory)

15:00 W3B.04 A Simulation of Laser Ablation During the Laser Pulse

Motoyuki Suzuki, Peter L.G. Ventzek, Y. Sakai (Hokkaido University, Dept. of Elect. Eng., Sapporo 060 Japan), H. Date (Hokkaido University, College of Med. Tech., Sapporo 060 Japan), H. Tagashira, K. Kitamori (Hokkaido Institute of Technology, Sapporo 065 Japan)

WPA.01 Collisional radiative model for surface-wave helium discharges at atmospheric pressure.

I. Peres, J. Margot (Dept de Physique, Universite de Montreal, Canada), L.L. Alves, C.M. Ferreira (IST, Lisbon Tech. U., Portugal), J. Hubert (Dept de Chimie, Universite de Montreal, Canada)

WPA.02 A Plasma Purification Method for Plasma Source Ion Implantation Doping of Semiconductors

Thomas Snodgrass, Dina Arnott, Maura Jenkins, Leon Shohet, John Booske (Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin Madison), Mark Kushner (Engineering Research Center for Plasma-Aided Manufacturing, University of Illinois Urbana)

WPA.03 Detection of Atomic Hydrogen in Processing Plasmas using Multi-Photon Laser-Induced Fluorescence

K. Muraoka, K. Miyazaki, T. Kajiwara, K. Uchino, T. Okada, M. Maeda (Kyushu University, Japan)

WPA.04 Electron Density and Temperature in a Neutral Loop Discharge Plasma

T. Sakoda, M.D. Bowden, K. Uchino, K. Muraoka (Kyushu University, Japan), M. Itoh, T. Uchida (ULVAC Japan Ltd.)

WPA.05 Measurement of plasma velocity using UV spectrometer

M.K. Vijaya Sankar, E. Eisner, A. Garofalo, T.H. Ivers, R. Kombargi, M.E. Mauel, D. Maurer, D. Nadle, G.A. Navratil, M. Su, E. Taylor, Q. Xiao (Columbia University)

WPA.06 Application of Degenerate Four Wave Mixing as a Diagnostic Method for Processing Plasmas

M.D. Bowden, H. Tagawa, S. Tokonami, K. Muraoka (Kyushu University, Japan)

WPA.07 C_2 Swan Band Absorption in a Microwave Plasma

A.N. Goyette, Y. Matsuda, L.W. Anderson, J.E. Lawler (Physics Department, University of Wisconsin, Madison, WI 53706)

WPA.08 Rotational Temperature in a N_2 Positive Column Dishcharge

J.R. Peck, A.N. Goyette, Y. Matsuda, L.W. Anderson, J. E. Lawler (Physics Department, University of Wisconsin, Madison, WI 53706)

WPA.09 LIF measurements of CH, H and CH2 species in a H2-CH4 dc discharge

G. Sultan, G. Baravian (LPGP, CNRS, U. of Paris-Sud, F-91405 Orsay), C. Hayaud (Innovatique, F-69386 Chassieu), J. Amorim (ITA, Sao Jose dos Campos, Brazil)

WPA.10 IR Laser Diagnostics of Mixed Methane, Hydrogen and Oxygen Plasmas

Wai Y. Fan, Paul B. Davies (Chemistry Dept., Cambridge University), Juergen Roepcke (INP, Germany)

WPA.11 Proton Donor Production and Transport

M. Hing, G. Brooke, S. Popovi\'c, L. Vu\vskovi\'c (Old Dominion University, Norfolk, VA)

WPA.12 Experimental Studies of DC-excited Plasma Discharges in HMDSN-SF_6 Mixtures

Rogério Pinto Mota, Regiane Godoy de Santana, Mauricio Antonio Algatti, Roberto Yzumi Honda, Milton Eiji Kayama (FE-DFQ-UNESP, 12500-000 Guaratinguetá, SP, Brazil)

WPA.13 Loading and Flow Rate Effects in an RIE Scale-up

M.J. Buie (Applied Materials; Dielectric Etch Division; Santa Clara, CA), P.L.G. Ventzek (Hokkaido University, Sapporo, Japan)

WPA.14 Enhanced RF Sputtering of Dielectrics Using an Inductively Coupled Plasma

Patrick F. Gonzalez (Symbios Logic, Ft. Collins CO), Denis Shaw, George J. Collins (Colorado State University)

WPA.15 Detection of SiF_2 as a primary product of Si and SiO_2 reactive ion etching with CF_4 gas

Jean-Paul Booth, Gilles Cunge, Pascal Chabert (Lab. de Spectrométrie Physique, Université de Grenoble, France)

WPA.16 Probe Measurements of Negative Ions Densities in Electronegative Gas Plasmas

N.A. Khromov, S.N. Lazaryuk, V.A. Romanenko (S.I. Vavilov State Optical Institute, Sosnovy Bor, St. Petersburg, Russia), A.A. Kudryavtsev (St. Petersburg University, Russia)

WPA.17 Reaction Mechanisms in Glow Discharges of Tetramethylsilane- Nitrogen-Helium Mixtures

Mario Bica de Moraes, Elidiane Rangel, Steven Durrant (University of Campinas, SP, Brazil)

WPA.18 Optical Diagnostics of Electrical Effects of Ion Bombardment of Semiconductor Surfaces.

Badakhshan, Jeff L England (University of Northern Iowa), P Thompson (Minnesota Supercomputer Institute), P. Cheung (Dept. of Computer Engineering, University of Minnesota-Duluth.)

WPA.19 Experimental investigation of capacitively coupled RF discharge in oxygen

U. Buddemeier, M. Harms, H. Schlüter (Institute for Experimental Physics II, University of Bochum, Germany)

WPA.20 Measurement of Negative Ions in a RF NF_3/Ar Plasma

A. Kono, T. Hayashi, S. Hirose, T. Goto (Nagoya University, Nagoya, Japan)

WPA.21 Plasma Impedance Monitor for Characterising Capacitive and Inductive Discharges

Kieran Dobbyn, Ciaran O'Morain, Michael Hopkins (Scientific Systems Ltd., Dublin City University, Glasnevin, Dublin 9, IRELAND)

WPA.22 Breakdown and afterglow physics of pulsed 13.56MHz capacitive discharges in Ar

J.P. Booth, G. Cunge, N. Sadeghi (Lab. de Spectrométrie Physique, Université de Grenoble, France), R. Boswell (PRL, Australian National University, ACT, Australia), N. St J. Braithwaite (The Open University, Milton Keynes, UK)

WPA.23 A quasi-optical 1 mm heterodyne interferometer and its application for determination of the electron density in an RF plasma source

V. Schulz-von der Gathen, N. Niemöller, A. Stampa, H.F. Döbele (Universität Essen; Inst. f. Laser- und Plasmaphysik; 45117 Essen; Germany)

WPA.24 Comparison of Determination of Dissociation by emision spectroscopy and a two-photon LIF scheme

U. Czarnetzki, V. Schulz-von der Gathen, H.F. Döbele (Universität Essen; Inst. f. Laser- und Plasmaphysik; 45117 Essen; Germany), L. Cherigier (CEA/ Cadarache; DRFC; 13108 Saint Paul lez Durance; France)

WPA.25 Affects of rf platten biasing phase on inductive coupling in a planar spiral inductive coil

Albert R. Ellingboe, R. D. Benjamin (Lawrence Livermore National Laboratory, Univ. of California)

WPA.26 AES Temperature Diagnostics in an Inductively Coupled Plasma Torch for the Deposition of High Purity Fused Silica for Optical Waveguides.

G. Cocito, L. Cognolato, C. Panciatichi, A. Zazo (CSELT-Italy), V. Colombo (University of Bologna-Italy)

WPB.01 The Hook Method for the Determination of Ground State and Metastable Density in a High-Pressure Mercury Discharge

Manfred Kettlitz, Eckhard Kindel, Conrad Schimke, Heinz Schöpp (Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, Germany)

WPB.02 Radiative Lifetimes of Odd-Parity Levels in Cr I

J.C. Cooper, N.D. Gibson, J.E. Lawler (Physics Department, University of Wisconsin, Madison, WI 53706)

WPB.03 Atomic Transition Probabilities for Rare Earths

J.J. Curry, Heidi M. Anderson, E.A. Den Hartog, M.E. Wickliffe, J.E. Lawler (Physics Department, University of Wisconsin, Madison, WI 53706)

WPB.04 Gas-Phase Reactions of H_3O^+.(H_2O)_0,1 with a Series of Sulfides and Thiols

Ted Williams, Lucia Babcock, Nigel Adams (U. of Georgia, Athens, GA)

WPB.05 N*+ Production from N_2*+ Dissociation in Nitrogen at Elevated E/N

J. de Urquijo, E. Basurto, I. Domínguez, I. Alvarez, C. Cisneros (Instituto de Física, UNAM, México.)

WPB.06 Kinetic Energy Distributions of N^+, N_2^+, and N_3^+ at High E/N.

M.V.V.S. Rao, R.J. Van Brunt, J.K. Olthoff (NIST, Gaithersburg, MD 20899), T. \v Simko, J. Bretagne, G. Gousset (LPGP, Universitsé Paris-Sud 91405 Cedex, France)

WPB.07 Transport of H^+, H_2^+, and H_3^+ at High E/N and Relevant Ion-Molecule Collision Cross Sections.

T. \v Simko, J. Bretagne, G. Gousset (LPGP, Universitsé Paris-Sud 91405 Cedex, France), M.V.V.S. Rao, R.J. Van Brunt, J.K. Olthoff, Yicheng Wang (NIST, Gaithersburg, MD 20899), B.L. Peko, R.L. Champion (College of William and Mary, Williamsburg, VA 23187)

WPB.08 Kinetic Energy Distributions of O_2^+ and O^+ from DC Townsend Discharge of O_2.

M.V.V.S. Rao, R.J. Van Brunt, J.K. Olthoff (NIST, Gaithersburg, MD 20899)

WPB.09 Heterogeneous Deactivation Studies of N_2 at 17 Torr on Gold and Nitrided Pyrex

John Parish, Perry Yaney (University of Dayton)

WPB.10 Elastic, Vibrational and Integrated for e-Scattering Metyl Acetylene and Allene

Ludwig Boesten, Hiroshi Tanaka (Sophia University, Tokyo, Japan), Michael Dillon (Argonne National Lab, Argonne, IL)

WPB.11 Elastic Scattering From CO2 Molecules: Experimental and Theoretical Results

T. Masai, H. Tanaka, L. Boesten (Sophia, Univ., Tokyo, Japan), M. Takekawa, Y. Itikawa (Inst. Sp. Astro. Sci., Japan), M. Kimura (Yamaguchi Univ., Japan)

WPB.12 Electron and Positron Polyatomic Molecule Scattering: Experimental and Theoretical Studies for Acetic Acid and Formic Acid

M. Kimura, R. Hamada, O. Sueoka (Yamaguchi Univ., Japan), H. Sato (Ochanomizzu Univ., Japan)

WPB.13 Electron-Impact Excitation Cross Sections of H_2 Using the Method of Continued Fractions

Mu-Tao Lee, Milton Massumi Fujimoto, Ione Iga (Departamento de Química, UFSCar, CP676, 13565-905 São Carlos, SP, Brazil), Teodosio Kroin (Departamento de Física, UFSC, 88049, Florianópolis, SC, Brazil)

WPC.01 Optical Emission Measurements Adjacent to a rf Biased Electrode in an Inductively Coupled Plasma

Eric Benck, Amelia Gates (Summer Undergraduate Research Fellow, Miami University, Oxford, OH), Jim Roberts (NIST)

WPC.02 Fast Time Resolved Measurements in the UK GEC Reference Reactor.

C.M.O. Mahony, W.G. Graham (Physics Dept.The Queen's University of Belfast, Northern Ireland), R. Al-Wazzan (Andor Technology, Malone Rd, Belfast, Northern Ireland)

WPC.03 RF Penetration of a DC Sheath

Husain Kamal, Noah Hershkowitz (University of Wisconsin, Madison)

WPC.04 On the mechanism of the transition from bulk to sheath heating mode in CCRF discharges

U. Buddemeier, M. Harms, I.D. Kaganovich, U. Kortshagen (University Bochum, Germany), L.D. Tsendin (St.Petersburg Technical State University, Russia)

WPC.05 Relationship between ion flux and sheath impedance for low-density rf plasma sheaths

Mark Sobolewski (NIST, Gaithersburg, MD)

WPC.06 A Consistent Step Model for the Capacitive RF Sheath

Joachim Gierling, Karl--Ulrich Riemann (Ruhr--Universität Bochum, D--44780 Bochum, Germany)

WPC.07 Studies on the Transient Presheath

Peter Meyer, Karl-Ulrich Riemann (Theor.\ Physik I, Ruhr-Universität Bochum, Germany)

WPC.08 Quasi-Steady-State Connection Formula for Sheaths

Merle Riley (Sandia National Labs, Alb., NM)

WPC.09 Unified Model of the rf Plasma Sheath, Part II

Merle Riley (Sandia National Labs, Alb., NM)

WPC.10 Formation of a High Conducting Plasma in Front of a Cold Cathode

Jochen Schein, Michael Schumann, Juergen Mentel (Ruhr--University Bochum, Germany)

WPC.11 Electron Yields per Ion, Resonant Photon, and Metastable at Ar Discharge Cathodes from DC and Transient Voltage and Current

A.V. Phelps (JILA, U. of Colorado and NIST)

WPC.12 DC sheath resistance of capacitively coupled discharges in the GEC reactor.

L.J. Overzet, B.E. Cherrington, J. Kleber, K. Yi (University of Texas at Dallas), M.B. Hopkins (Dublin City University)

WPD.01 Evaluation of Ash Toxicity Generated From the Thermal Plasma Pyrolysis of Used Automobile Tires

J.S. Chang, D.R. Novog, S. Jamal (Dept. of Eng. Phys., McMaster University, Hamilton, Ontario, Canada, L8S 4M1)

WPD.02 RF Glow-discharge Enhanced Production of Oxygen from Carbon Dioxide

Zhong Shi, Robert L. Ash (Old Dominion University, Norfolk, VA)

WPD.03 Destruction of Hazardous Industrial Chemicals Using an Arcjet Plasma Torch*

C. B. Fleddermann, H. R. Snyder, J. M. Gahl (Department of Electrical and Computer Engineering, University of New Mexico, Albuquerque, NM 87131)

WPD.04 Correlation Between Spectral Intensities of Coal and Coal Ash Using Emission Spectroscopy

W.L. Collett, B. Bell, S.M. Mahajan, S.S. Munukutla (Tennessee Technological University)

WPD.05 Simulation of Microdischarges in a Dielectric-barrier

Shirshak Dhali, Jing Li (Southern Illinois University, Carbondale, Illinois 62901)