Program overview

TUESDAY MORNING, 22 OCTOBER 1996

08:00 TU1A.01 Heating mechanisms and mode changes in helicon plasmas

Albert R. Ellingboe (Lawrence Livermore National Laboratory \footnote[1]\footstrut This work performed for US DOE by LLNL under contract W-7405-ENG-48.\footstrut)

08:30 TU1A.02 Simulating the effect of Helicon waves on the Ionisation Rate by Electron Trapping in the wave Electric Field

A.W. Degeling, R.W. Boswell (Space Plasma Group, RSPhysSE, The Australian National University, ACT, 0200, Australia)

08:45 TU1A.03 Low-Field, Large-Area Helicon Sources

F.F. Chen, J.D. Evans, X. Jiang (UCLA), G. Tynan (PMT, Inc.)

09:00 TU1A.04 Quasilinear theory of collisionless electron heating in rf gas discharges

Y.M. Aliev (Lebedev Institute, Russia), I.D. Kaganovich, H. Schlüter (University Bochum, Germany)

09:15 TU1A.05 Simulation of plasma breakdown in a low pressure, rf plasma.

H.B. Smith, R.W. Boswell (Space Plasma Group, RSPhysSE, The Australian National University, ACT, 0200, Australia), D. Vender (School of Physical Sciences, Dublin City University, Dublin, Ireland.)

09:30 TU1A.06 Sheath dynamics in a high-density, inductively-coupled plasma

Mark Sobolewski (NIST, Gaithersburg, MD)

09:45 TU1A.07 The role of collisions and non-linear effects on collisionless heating in inductive and capacitive discharges

U. Buddemeier, I.D. Kaganovich, U. Kortshagen (University Bochum, Germany)

08:00 TU1B.01 Radiation Transport and Optical Diagnostics in the Lighting Industry

Graeme Lister (OSRAM SYLVANIA INC., Beverly MA 01915)

08:30 TU1B.02 Photon And Electron-Stimulated Desorption From Surfaces

Thomas M. Orlando (Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory (PNNL is operated for the U.S. Department of Energy by Battelle Memorial Institute under contract DE-ACO6-7RLO 1830.), Richland, WA 99352)

09:00 TU1B.03 Free-Electron Laser Wavelength-Selective Materials Alteration and Photoexcitation Spectroscopy

Norman. Tolk (Department of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235)

TU1B.04 Femtosecond Laser Ionization with Applications to Surface

Michael R. Savina, Keith R. Lykke (Argonne National Lab, Argonne, IL)

TU1B.05 Kinetics in Xe/I_2 Inductively Coupled RF Discharges at Low Pressure

Paul Barnes (Wright Laboratory, WPAFB, OH), Mark Kushner (University of Illinois, Urbana, IL)

10:30 TU2A.01 Electron-Atom Collisions: An Evergreen in Physics and Technology.

Chun C. Lin (University of Wisconsin-Madison)

13:30 TU3A.01 Comparison of Ion and Neutral Temperatures in Various High Density Plasma Sources

Toshiki Nakano, Hiroto Ohtake, Seiji Samukawa (National Defense Academy, NEC Corporation)

14:00 TU3A.02 Modeling and Measurements of Plasma Properties in a 300mm Inductively-Coupled Plasma Etching System

Wenli Z. Collison, Tom Q. Ni, Michael S. Barnes

14:15 TU3A.03 Two Dimensional Flux Non-Uniformities in High Density Plasma Reactors Using BCl3/Cl2 Gas Mixtures

S.J. Choi, J.W. Shon (Sandia National Laboratories)

14:30 TU3A.04 Development and Optimization of the Decoupled Plasma Source for Metal Etch Using Wafer-based Probes

Peter K. Loewenhardt, Hiroji Hanawa, Diana X. Ma, Phillip Salzman, Kien Chuc, Arthur Sato, Valentin Todorov, Gerald Z. Yin (Applied Materials, Santa Clara, CA 95054)

14:45 TU3A.05 Ion Distribution Functions in an ECR Discharge Plasma

Glenn Joyce, Martin Lampe, W.M. Manheimer, Steve Slinker (Naval Research Laboratory, Washington, DC)

15:00 TU3A.06 Pulse-Power Modulated High Density Electronegative Discharges for Plasma Processing

Michael Lieberman, Sumio Ashida, Venkatesh P. Gopinath (EECS Dept., U.C. Berkeley, Berkeley, CA 94720-1770)

13:30 TU3B.01 Recent developments in plasma display technology.

Larry Weber (Plasmaco)

14:00 TU3B.02 AC Plasma Display Panel Cells: Overview and Modeling

C. Punset, J.P. Boeuf, L.C. Pitchford (CPAT, 118 route de Narbonne, 31062 Toulouse Cedex France)

14:30 TU3B.03 2-D models of plasma switches for display addressing

G. J. Parker (Lawrence Livermore National Laboratory)

14:45 TU3B.04 Two dimensional simulations of pixel cross-talk in plasma displays.

Ramana Veerasingam, Robert B Campbell, Robert T McGrath (Sandia National Labs,New Mexico)

15:00 TU3B.05 High Pressure Hollow Cathode Discharges

Karl H. Schoenbach, Thomas Tessnow, Ahmed ElHabachi (Physical Electronics Research Institute, Old Dominion University, Norfolk, VA)

TUPA.01 Behaviors Of Si Atom And SiH_x^+ (x=0-3) Ions In ECR SiH_4 Plasma

Yasuo Yamamoto, Shinji Suganuma, Masafumi Ito, Masaru Hori, Toshio Goto (Nagoya University, Nagoya, Japan), Mineo Hiramatsu (Meijo University, Nagoya, Japan)

TUPA.02 Dissociation Processes of Fluorocarbons in ECR Etching Plasmas

Koji Miyata, Hiroyoshi Arai, Masaru Hori, Toshio Goto (School of Engineering, Nagoya University)

TUPA.03 A Comparison of Thomson Scattering and Langmuir Probe Measurements of Electron Temperature and Density in High Density Plasma Sources.

M.D. Bowden, T. Hori, K. Uchino, K. Muraoka (Kyushu University, Japan), M.B. Hopkins (Dublin City University, Ireland), C. O'Morain (Scientific Systems Ltd., Ireland)

TUPA.04 Ion amp; Electron Energy Analysis of Pulsed and CW Helicon Plasmas.

G.D. Conway, A.J. Perry, R.W. Boswell (Plasma Research Lab., Australian Natl. Univ.)

TUPA.05 Time-Dependent Kinetics of the Nitrogen Afterglow in N_2 and N_2-Ar Microwave Discharges

J. Loureiro (CEL-IST, Lisbon Tech.Univ.,Portugal), P.A. Sá (DEEC-FEUP, Oporto Univ.,Portugal)

TUPA.06 Neutral Chemistry in C F_4/O_2 Microwave Downstream Plasmas

M. Tuda, T. Nakahata, K. Ono (Mitsubishi Electric Corp., Amagasaki 661, Japan)

TUPA.07 Selective Etching of Silicon Nitride using a Remote Microwave Plasma

C.B. Brooks, Walter Merry (Applied Materials; Dielectric Etch Division; Santa Clara, CA)

TUPA.08 The Roles of Plasma Species on Polycrystalline Silicon Film Formation by ECR SiH_4/H_2 Plasma

Masafumi Ito, Ryouichi Nozawa, Kazuya Murata, Masaru Hori, Toshio Goto (Quantum Engineering, Nagoya University, JAPAN)

TUPA.09 Ionized Magnetron Sputtering with a Coupled DC and Microwave Plasma

D.B. Hayden, K.M. Green, D.R. Juliano, D.N. Ruzic (University of Illinois), C.A. Weiss, A. Lantsman, J. Ishii (Materials Research Corperation)

TUPA.10 Antenna coupling to helicon waves in a radially nonuniform plasma.

D. Arnush, F.F. Chen (UCLA)

TUPA.11 2-D Optical Imaging of Permanent Magnet ECR Source

Aaron R. Wilson, Steve S. Shannon, Mary L. Brake, Ward D. Getty (Center for Display Technology and Manufacturing, University of Michigan)

TUPA.12 Determination of the negative ion concentration in an SF_6/Ar magnetoplasma created by an electromagnetic surface-wave under ECR conditions.

L. St-Onge (Dept de Physique, Universite de Montreal, Canada), M. Chaker (INRS-Energie et Materiaux, Varennes, Canada), J. Margot (Dept de Physique, Universite de Montreal, Canada)

TUPA.13 Positive ion and electron characteristics in an SF_6/Ar magnetoplasma created by an electromagnetic surface-wave under ECR conditions.

L. St-Onge, J. Margot (Dept de Physique, Universite de Montreal, Canada), M. Chaker (INRS-Energie et Materiaux, Varennes, Canada)

TUPA.14 Etching Characterization of a Cusped-Field Helicon Plasma Etcher

Anthony Quick, Moshe Sarfaty, Noah Hershkowitz (Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison)

TUPA.15 Relationship Between Plasma Emission Intensity and Film Properties for ECR Silicon Oxide Deposition

Kok Heng Chew, Edward Augustyniak, R. Claude Woods, J. Leon Shohet (ERC for Plasma-Aided Manufacturing, University of Wisconsin, Madison, WI 53706)

TUPA.16 In-Situ Surface Diagnostics of a-Si:H Films during ECR-H_2 Plasma Annealing

Masaru Hori, Ryouichi Nozawa, Hirohisa Takeda, Masayuki Nakamura, Masafumi Ito, Toshio Goto (Quantum Engineering, Nagoya University, JAPAN)

TUPA.17 Mass spectrometric detection of F atoms and CF_x radicals and their kinetics in CF_4 plasmas.

A. Tserepi, J. Derouard, W. Schwarzenbach, N. Sadeghi (Lab Spectrometrie Phys. Grenoble Univ, Grenoble, France)

TUPA.18 Energy selective compact electron cyclotron resonance plasma-induced nitridation processes on sapphire substrates

Patrick O'Keeffe, Harunobu Mutoh, Shoji Den, Yuzo Hayashi (Irie Koken Co., Ltd. Japan), Shuji Komuro, Takitaro Morikawa (Toyo University, Japan)

TUPA.19 Measurements of Molecular Densities in Low Pressure Discharge Plasmas Using Laser Raman Scattering

K. Muraoka, Y.B. Song, K. Uchino (Kyushu University, Japan), T. Sakoda (Kitakyushu National College of Technology, Japan), K. Yanagishita, S. Nakamura (ULVAC Japan Ltd.)

TUPA.20 Ionization waves in a dusty plasma.

D. Samsonov, J. Goree (The University of Iowa)

TUPA.21 Observation of Individual Particles in a Flowing Silane rf Discharge by Laser Light Scattering

M.A. Childs, Alan Gallagher (JILA, University of Colorado - Boulder, Boulder, CO)

TUPA.22 Electron Beam Ablation of Metals

S.D. Kovaleski, R.M. Gilgenbach, J.I. Rintamaki, L.K. Ang, H.L. Spindler, W.E. Cohen, Y.Y. Lau (University of Michigan, Ann Arbor, MI), J.S. Lash (Sandia National Lab, Albuquerque, NM)

TUPA.23 XeCl Excimer Laser Ablation of ZnO for Preparation of Transparent Conducting Thin Films

Kouichi Imaeda, Mineo Hiramatsu, Masahito Nawata (Meijo University, Nagoya, JAPAN)

TUPA.24 Oxygen Radical Assisted Laser Evaporation of Polysiloxane for Preparation of Insulating Films with Low Dielectric Constant

Toshiaki Fujii, Tsuneki Yokoi, Mineo Hiramatsu, Masahito Nawata (Meijo University, Nagoya, Japan), Masaru Hori, Toshio Goto (Nagoya University, Nagoya, Japan), Shuzo Hattori (Nagoya Industrial Science Research Institute, Nagoya, Japan)

TUPA.25 Polysilicon Etch Endpoint Detection using an rf Impedance Probe

C Almgren (Symbios Logic, Fort Collins CO 80525), D. M. Shaw , G. J. Collins (Dept. of Electrical Engineering, Colorado State University, Fort Collins, CO 80523), J. Gilmore (Advanced Energy Industries, Inc., Fort Collins, CO 80525)

TUPA.26 Comparing Sputtering of NH_3/CO/Ni(111) by Atomic and Polyatomic Ions

Earl T. Ada, Luke Hanley (Univeristy of Illinois at Chicago)

TUPB.01 Enhanced Electron Attachment to Highly-Excited Molecules Using a Plasma Mixing Scheme ^*

Dennis McCorkle, Lal Pinnaduwage (ORNL and Univ. Tenn., Knoxville)

TUPB.02 Ionization and Electron Attachment in Methane

J. de Urquijo, C.A. Arriaga, I. Domínguez, C. Cisneros, I. Alvarez (Instituto de Física, UNAM, México.)

TUPB.03 Temperature Dependence of Dissociative Electron Attachment to Halogenated Hydrocarbons

Yicheng Wang, Loucas G. Christophorou (NIST, Gaithersburg, MD 20899)

TUPB.04 Low-Energy Electron Impact Excitation of the (010) Bending Mode of CO_2

Winifred M. Huo (NASA Ames Research Center)

TUPB.05 Small Angle Elastic Electron Scattering by Polarized 3P Sodium

H. Wei, Z. Shi, Y. Wang, L. Vu\vskovi\'c (Old Dominion University, Norfolk, VA)

TUPB.06 Atomic Rearrangements in Electron Attachment to Laser-Excited Molecules^*

Lal Pinnaduwage, Dennis McCorkle (ORNL and Univ. Tenn., Knoxville)

TUPB.07 Photophysical and Electron Attachment Properties of ArF-Excimer-Laser Irradiated Molecular Hydrogen^*

Panos Datskos, Lal Pinnaduwage (Oak Ridge National Laboratory and University of Tennessee, Knoxville)

TUPB.08 LTE Deviations as Function of radial position in Hg High-Pressure Discharge Lamps

Georges Zissis (CPAT, Toulouse, France), Kamel Charrada (ESSETT, Tunis, Tunisia)

TUPB.09 Electron and Positron Polyatomic Molecule Scattering: Experimental and Theoretical Studies for Benzene

R. Hamada, O. Sueoka, M. Kimura (Yamaguchi Univ., Japan), H. Sato (Ochanomizzu Univ., Japan)

TUPB.10 Low-Energy Electron Interactions with CF_4

Loucas G. Christophorou, James K. Olthoff, M.V.V.S. Rao (NIST, Gaithersburg, MD 20899)

TUPB.11 Boltzmann Calculations of Electron Transport in CF_4 and CF_4/Ar

Yicheng Wang, R.J. Van Brunt (NIST, Gaithersburg, MD 20899)

TUPB.12 Production of metastable atoms following dissociative excitation of oxygen containing molecules.

J.M. Derbyshire, W. Kedzierski, J.W. McConkey (University of Windsor)

TUPB.13 The Cross Section for the Formation of N_2^+(X) Ions Produced by Electron Impact on N_2.

R. Siegel, N. Abramzon, K. Becker (City College of CUNY, USA)

TUPB.14 LIF detection of unexcited fragments following electron impact dissociation of molecules.

T. Harb, W. Kedzierski, L.R. LeClair, J.W. McConkey (University of Windsor)

TUPB.15 Neutral Dissociation Plus Excitation Cross Section in N_2.

L. Mi, R. A. Bonham (Dept. of Chemistry, Illinois Institute of Technology , Chicago, IL 60616)

TUPB.16 Ion Chemistry in Boron Trichloride BCl_3

Charles Q. Jiao, Rajesh Nagpal, Peter D. Haaland (Wright Laboratory, Wright-Patterson AFB, OH)

TUPC.01 Simulations of the ionization growth in a plasma display cell.

Ramana Veerasingam, Robert B. Campbell, Robert T. McGrath (Sandia National Labs,New Mexico)

TUPC.02 Simulations of the ionization growth in a plasma display cell.

Ramana Veerasingam, Robert B Campbell, Robert T McGrath (Sandia National Labs,New Mexico)

TUPC.03 Cascade Model of Ionization Multiplication of Electrons in Glow Discharge Plasma

V.A. Romanenko, S.A. Solodky (S.I.Vavilov State Optical Institute, Sosnovy Bor, St.Petersburg, Russia), A.A. Kudryavtsev, I.A. Suleymanov (St.Petersburg University, Russia)

TUPC.04 New Convected Scheme simulations of positive column discharges

G.J. Parker (Lawrence Livermore National Laboratory), W.N.G. Hitchon, E.R. Keiter (Univ. of Wisconsin--Madison)

TUPC.05 Neutral Gas Dynamic Transport in a Model GEC Cell

Dean C. Wadsworth (Hughes STX), Andrew D. Ketsdever, David P. Weaver (Propulsion Directorate, Phillips Lab, Edwards AFB, CA)

TUPC.06 Time-Dependent Multi-Term Treatment of the Velocity Distribution of Plasma Electrons Acted upon by RF Fields

Detlef Loffhagen, Rolf Winkler (Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, Germany)

TUPC.07 Plasma instabilities due to ponderomotive forces of low pressure RF discharges containing negative ions

I.D. Kaganovich (University Bochum, Germany), V.A. Schweigert (Novosibirsk Institute of Theoretical and Applied Mechanics, Russia, 630090)

TUPC.08 Modeling Low Pressure Plasmas with Fluid Models: Comparison to Monte Carlo and Nonlocal Electron Kinetic Treatments

D.B. Graves, H. Date, M. Li, J. Bukowski (University of California, Berkeley, CA)

TUPC.09 PIC-MCC Simulation of Discharges with Secondary Emission

M.M. Turner (Dublin City University, Ireland)

TUPC.10 Numerical Solution of the Multiboundary Problem for Multicomponent Plasmas with Respect to Ion Temperature

Franz-Burkhard Anschütz, Peter Awakowicz (Physics of Electrotechnology, Technical University Munich, Germany), Hans-Burkhard Valentini (Institut für Physikalische Hochtechnologie, Jena, Germany)

TUPC.11 Two Dimensional Fluid Simulation of Glow Discharges in Arbitrary Cartesian Geometry

Jae J. Oh (Samsung Advanced Institute of Technology, Korea)

TUPC.12 Experimental studies of kinetic energy release distribution of argon atoms from homogeneous and heterogeneous rare gas clusters using covariance mapping mass spectroscopy

David Khatchatrian, Charles Rhodes (University of Illinois at Chicago Physics Department Laboratory for Atomic, Molecular and Radiation Physics)