Program overview

SUNDAY EVENING, 26 SEPTEMBER 2004

ES1.001 Recombination

ES1.002 A New Photoion Method for Electron-Ion Recombination Studies

O. Novotny, B. Sivaraman, C. Rebrion-Rowe, D. Travers, J.B.A. Mitchell, B.R. Rowe (Universite de Rennes I)

ES1.003 Recombination and detachment in oxygen discharges diluted with argon: The role of metastables

J.T. Gudmundsson (Department of Electrical and Computer Engineering, University of Iceland, Reykjavik, Iceland)

ES1.004 Dissociative Recombination of CF3+

G. Angelova, J.L. LeGarrec, C. Rebrion-Rowe, B.R. Rowe, J.B.A. Mitchell (Universite de Rennes I), PALMS Team

ES1.005 Branching Ratios for the Dissociative Recombination of Hydrocarbon Ions

C. Rebrion-Rowe, G. Angelova, J.L. LeGarrec (Universite de RennesI), J.B.A. Mitchell, O. Novotny (Charles University, Prague), H. Bluhme, K. Seiersen, A. Svendsen, L.H. Andersen (Aarhus University)

ES1.006 Dissociative Recombination of NeH+

Anca Florescu (Universite de Rennes I), A.E. Orel (UC Davis), J.B.A. Mitchell, O. Novotny, G. Angelova, J.L. LeGarrec, C. Rebrion-Rowe (Universite de Rennes I), A. Svendsen, L.H. Andersen (Aarhus University)

ES1.007 Other Plasma Topics

ES1.008 Effect of ultrasound waves on electrical characteristics of hollow needle to plate electrical discharge in air or in mixture of air with VOC

Stanislav Pekarek, Rudolf Balek (Czech Technical University in Prague, Technická 2, 166 27 Prague 6, Czech Republic), Milan Pospisil (Institute of Chemical Technology, Technická 5, 166 278 Prague 6, Czech Republic)

ES1.009 Secondary Plasma Formation in Neutralization Cells associated with High Energy Neutral Beam Injectors

N. J. Fitzgerald, A. R. Ellingboe, M. M. Turner (Dublin City University, Ireland), B. Crowley (Culham Science Centre, England)

ES1.010 Glows

ES1.011 Power Transfer Efficiency of Plasma Sources

Valery Godyak (Osram Sylvania)

ES1.012 Comments on experiments supporting a novel energy source from atomic hydrogen.

A. V. Phelps (JILA, U. of Colorado and NIST)

ES1.013 Glow discharges in low pressure hollow cathode geometries

T.H. Callegari, F. Gegot, J. Galy, L. Pitchford, J-P Boeuf (CPAT, Univ P Sabatier, Toulouse, France)

ES1.014 Glow discharges in high pressure microhollow cathodes

J-P Boeuf, L.C. Pitchford (CPAT, CNRS and Univ P. Sabatier, Toulouse, France), K.H. Schoenbach (Old Dominion Univ, VA)

ES1.015 Influence of Electron and Excited States Densities on the Electron Energy Distribution Function of Argon Microwave Plasmas

A. Yanguas-Gil, J. Cotrino (ICMSE, CSIC - Univ. Sevilla, Spain), L. L. Alves (CFP, IST, Portugal)

ES1.016 Gas Thermal Model for Low-pressure Microwave Discharges

L.L. Alves (CFP, IST (Portugal)), J. Cotrino (ICMSE, CSIC (Spain))

ES1.017 Two-dimensional simulation of surface wave discharges

Gerjan Hagelaar (Centre de Physique des Plasmas et Applications de Toulouse (CPAT), France)

ES1.018 On Characterization of a Subcritical Microwave Discharge

S. Popovic, L. Vuskovic, A. Mason (Department of Physics, Old Dominion U., Norfolk, Virginia)

ES1.019 Ion flux energy and mass distributions at the cathode surface of DC discharges of H_2/CH_4/N_2 mixtures

A. M. Islyaikin, V. J. Herrero, I. Itanarro (Instituto de Estructura de la Materia (CSIC), Madrid, Spain), F. L. Tabares, D. Tafalla (Association Euratom/Ciemat, Madrid, Spain)

ES1.020 Characterization of Low-pressure Microwave Discharges in Argon

S. Letout (CFP, (Portugal)), C. Boisse-Laporte (LPGP, (France)), A. Yanguas (ICMS, (Spain)), L.L. Alves (CFP, (Portugal))

ES1.021 Dynamics of the breakdown in a discharge gap at high overvoltages.

A. Shvydky (University of Toledo), V.N. Khudik, V.P. Nagorny (Plasma Dynamics Corp., MI), C.E. Theodosiou (University of Toledo)

ES1.022 Self-consistent field profiles in surface wave-produced plasma columns

Babak Shokri, Mohammad Ghorbanalilu, Alireza Niknam (Laser Research Institue)

ES1.023 Modelling Inductively Coupled Hydrogen Discharges

Viktor Kadetov, Uwe Czarnetzki (Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Bochum, Germany)

ES1.024 Ion Injected IEC Discharge Physics.

George Miley (NPRE Dept., University of Illinois, U-C Campus), Yang Yang, Nie Luo, Yasser Shaban

ES1.025 Electron impact excitation of fine-structure levels in O IV and S X

Swaraj Tayal (Clark Atlanta University)

ES1.026 2DRMP-G : A 2-dimensional R-matrix propagator to study electron collisions with atoms and ions, using grid computing.

A. Carson, V. Faro-Mazo, T. Harmer, P. Preston, M.P. Scott, N.S. Scott, P.G. Burke (Queen's University Belfast)

ES1.027 B-Spline Breit-Pauli R-matrix calculations for electron collisions with heavy noble gases.

Oleg Zatsarinny, Klaus Bartschat (Drake University)

ES1.028 B-Spline R-matrix calculations for electron collisions with quasi-two-electron atoms.

Klaus Bartschat, Oleg Zatsarinny (Drake University)

ES1.029 Electron impact excitation of iron peak elements.

P.G. Burke, A. Hibbert, B.M. McLaughlin, C.A. Ramsbottom, M.P. Scott (Queen's University Belfast), V.M. Burke, C.J. Noble, A.G. Sunderland (CLRC, Daresbury Laboratory)

ES1.030 Electron collisions with quasi one-electron atoms and ions using an IERM method.

Angela Kinnen, Penny Scott (Queen's University Belfast)

ES1.031 Accurate r-ratios for the Electron Impact Excitation of Argon

Stephanie Proctor, J.\ G. Childers, Murtadha A. Khakoo (California State University, Fullerton, CA 92834, USA)

ES1.032 Atomic Lifetimes

ES1.033 Measurement of the 6P_1/2,3/2 Atomic Lifetimes of Cesium using a Mode-Locked Laser

B.M. Patterson, T. Takekoshi, R.J. Knize (Laser and Optics Research Center, United States Air Force Academy, CO 80840 USA), G. Brooke (Department of Physics, Virginia Military Institute, Lexington VA 24450 USA)

ES1.034 Heavy Particle Interactions

ES1.035 THE MOBILITY OF XE+ AND NE+ IONS IN XE/NE GAS MIXTURES

Jasmina V. Jovanovic (Faculty of Mechanical Engineering, 11000 Belgrade, Serbia and Montenegro), Zoran Lj. Petrovic (Institute of Physics, P.O.Box 68, 11080 Zemun, Belgrade, Serbia and Montenegro)

ES1.036 TOWNSEND DISCHARGES IN NEON AT VERY HIGH E/N

Zeljka D. Nikitovic, Aleksandra I. Strinic, Vladimir D. Stojanovic, Gordana N. Malovic, Zoran Lj. Petrovic (Institute of Physics, P.O.B. 68, 11080 Belgrade, Serbia and Montenegro)

ES1.037 Capacitively Coupled Plasmas

ES1.038 Design and modeling of a planar probe for power measurements in a capacitive plasma sheath

D. Gahan, M. B. Hopkins, A. R. Ellingboe (Dublin City University, Ireland)

ES1.039 Manipulating charged particle distributions in multiple frequency capacitively coupled discharges

Jafar Al-Kuzee, Alec Goodyear, Nicholas Braithwaite (The Open University, Oxford Research Unit, Boars Hill, Oxford OX1 5HR, UK)

ES1.040 Measurements and simulations of ion energy distribution functions in a dual-frequency capacitively-coupled discharge in hydrogen

D. O'Connell, M. M. Turner, A. R. Ellingboe (Dublin City University, Ireland)

ES1.041 Transport and Maintenance of RF-Generated Plasma Through Slots or Tubes

M.A. Lieberman, A.J. Lichtenberg, Sungjin Kim (UC Berkeley)

ES1.042 Characteristics of VHF capacitively coupled plasmas in a 300 mm chamber

G. A. Hebner, P. A. Miller, E. V. Barnat (Sandia National Laboratories), A. Paterson, J. Holland, T. Lill (Applied Materials)

ES1.043 Plasma non-uniformities in VHF capacitive discharges

P. Chabert, A. Perret, J.-L. Raimbault, J.-M. Rax (LPTP, Ecole Polytechnique, France)

ES1.044 Attachment cooling of electrons in oxygen-argon and SF6-argon mixtures

Natalia Babaeva, Sung Jin Kim, Gan Young Park, Jae Koo Lee (Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang, Korea)

ES1.045 Materials Processing In Low Pressure Plasmas

ES1.046 Measurements and Modelling of Plasma Ashing Equipment

C. Hayden, A. R. Ellingboe, M. M. Turner (Dublin City University, Ireland)

ES1.047 Decomposed Fragment Identification in C_8F_18 RF Plasma for a-C:F Film Production

Yosuke Sakai, Shota Tazawa, Maria Bratescu, Yoshiyuki Suda, Hirotake Sugawara (Hokkaido University)

ES1.048 Plasma properties during pulsed DC sputter-deposition of TiO2 photocatalytic thin films

WeiDong Zhu, Jose Lopez, Abe Belkind, Kurt Becker (Stevens Institute of Technology, Hoboken, NJ, USA)

ES1.049 Harmonics of the driving frequency and their use as a plasma processing diagnostic in radio-frequency plasmas

Raoul Franklin (The Open University, Oxford Reseaerch Unit, Oxford OX1 5HR, U.K.), Nicholas Braithwaite (The Open University, Oxford Research Unit, Oxford OX1 5HR, U.K.)

ES1.050 Deposition of DLC coatings using a combined microwave and hollow cathode plasma source

Denis Dowling, Fergal O'Reilly, Paul Duggan (University College Dublin), Glynn Dyson, Denis Teer (Teer Coatings), Teer Coatings Collaboration

ES1.051 Optical and electrical diagnostics of fluorine- and chlorine-containing plasmas during etching of high dielectric constant HfO_2 films

Kazuo Takahashi, Kouichi Ono, Yuichi Setsuhara (Department of Aeronautics and Astronautics, Kyoto University, Kyoto, Japan)

ES1.052 A prediction of thermal device damage during plasma etching

M. Osaka, T. Yagisawa, T. Shimada, T. Makabe (Keio University at Yokohama, Japan)

ES1.053 Chemistry and Physics of Amorphous Silicon Device Production

Wengang Zheng (JILA, Univ. of Colorado, Boulder, CO 80309-0440), Peter Horvath, Alan Gallagher (Same)

ES1.054 Plasma Diagnostics for the RF Physical Vapour Deposition of CuCl Thin Films

Gomathi Natarajan, Stephen Daniels (National Centre for Plasma Science and Technology, Dublin City University), Lisa O'Reilly (Research Institute for Networks and Communications Engineering, Dublin City University), David Cameron (National Centre for Plasma Science and Technology, Dublin City University), Patrick McNally (Research Institute for Networks and Communications Engineering, Dublin City University)

ES1.055 An investigation of the structural changes of ta-C and ta-C:N nano films as a function of thickness and arc current

Richard McCann, Susanta S. Roy, Pagona Papakonstantinou, Paul Maguire, Jim McLaughlin (NRI, School of Electrical and Mechanical Engineering, University of Ulster, Shore Road, Newtownabbey, N. Ireland.)

ES1.056 Species Densities and Temperatures in an Argon-Acetylene RF Plasma using Mass Energy Analysis

C.M.O. Mahony, G.L. McPeake, P.D. Maguire (Nanotechnology Research Institute, N.I. Bio-Engineering Centre, University of Ulster, BT37 0QB, Northern Ireland)

ES2.001 Diagnostics I

ES2.002 CF_2 density and temperature profiles in an Ar/C_4F_8/O_2 dual frequency capacitive discharge determined by UV absorption

Nicolas Bulcourt, Jean-Paul Booth, Garrett Curley (Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau, France (CNRS UMR 7648))

ES2.003 Phase and Space Resolved Rotational Temperature Measurements in Hydrogen RF Discharges

V. Schulz-von der Gathen, M. Abdel-Rahman, T. Gans, H.F. Döbele (Universität Duisburg-Essen, Inst. f. Experimentelle Physik, 45117 Essen, Germany)

ES2.004 Spatial structure and temporal evolution of fields around dissimilar surfaces present on an rf powered electrode

E. V. Barnat, G. A. Hebner (Sandia National Laboratories)

ES2.005 Electric field measurement methods based on xenon spectroscopy

Mark Bowden, Tao Jiang, Erik Wagenaars, Gerrit Kroesen (Dept. of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB, Eindhoven, Netherlands)

ES2.006 Measurement of rf-phase resolved plasma parameters in an RF plasma using an uncompensated Langmuir probe

S. Linnane, M. B. Hopkins, A. R. Ellingboe (Dublin City University, Ireland)

ES2.007 Interpretation of Langmuir Probe Characteristics in Unmagnetized Flowing Plasma

P. Sheerin (Dublin City University, Ireland), B. Doggett (Trinity College, University of Dublin, Ireland), M. M. Turner (Dublin City University, Ireland), J. G. Lunney (Trinity College, University of Dublin, Ireland)

ES2.008 Time-resolved double probe measurements in a pulsed magnetron discharge

Shantanu Karkari, James W. Bradley (Department of Physics, UMIST, Sackville Street, P.O.Box-88, M60 1QD, Manchester, U.K)

ES2.009 Time-Resolved Measurements in Pulsed DC Sputtering Magnetron

Ian Swindells, James Bradley (UMIST)

ES2.010 An active probe compensation technique for time-resolved Langmuir probe measurements on pulsed RF discharges

Sergey A. Voronin, James W. Bradley (Department of Physics, UMIST, PO Box 88, Sackville Street, Manchester M60 1QD, UK), Morgan R. Alexander (School of Pharmacy, University of Nottingham, University Park, Nottingham, NG7 2RD, UK)

ES2.011 A DC Biased Hairpin Resonator Probe

Robert Piejak (OSRAM SYLVANIA, Inc.)

ES2.012 Mass-spectrometry measurements in an rf asymmetric capacitively-coupled oxygen discharge

Magdalena Aflori (Department of Plasma Physics, Al. I. Cuza University, Iasi, Romania), Cezar-Mihai Gaman (Department of Plasma Physics, Al. I. Cuza University, Iasi, Romania and Plasma Research Laboratory School of Physical Sciences Dublin City University Dublin, Ireland), Liliana-Mihaela Ivan, Mihaela Mihai-Plugaru, Dan-Gheorghe Dimitriu (Department of Plasma Physics, Al. I. Cuza University, Iasi, Romania), Department of Plasma Physics Team, Plasma Research Laboratory School of Physical Sciences Dublin City University Dublin 9 Ireland Collaboration

ES2.013 Effect of Admixture of Rare Gases on Microwave-Excited Oxygen Plasma

Takeshi Sakamoto, Kouichi Naoi, Naohisa Kitamura, Haruaki Matsuura, Hiroshi Akatsuka (Tokyo Institute of Technology)

ES2.014 A SEERS Model for Magnetically Enhanced Discharges

T. Mussenbrock, J. Reinelt, R.P. Brinkmann (Theoretische Elektrotechnik, Ruhr-Universität Bochum, D-44780 Bochum, Germany)

ES2.015 The Resonances of a Bounded Plasma and their Relation to SEERS

R.P. Brinkmann, T. Mussenbrock (Theoretische Elektrotechnik, Ruhr-Universität Bochum, D-44780 Bochum, Germany)

ES2.016 Simple Estimation Method of RF Current in Inductively Coupled Plasmas

Kawata Hiroaki, Yasuda Masaaki, Hirai Yoshihiko (Osaka Prefecture University)

ES2.017 Atmospheric Plasma Analysis By Molecular Beam Mass Spectrometry

Y. Aranda Gonzalvo (Hiden Analytical Ltd.), J.A. Rees, C.L. Greenwood, T.D. Whitmore, D.L. Seymour, I.D. Neale

ES2.018 Ionization processes of Ti atoms in magnetron sputtering plasmas studied by laser-induced fluorescence imaging spectroscopy

N. Nafarizal, N. Takada (Nagoya University, Japan), K. Nakamura (Chubu University, Japan), M. Kobayashi (ANELVA Corp., Japan), K. Sasaki (Nagoya University, Japan)

ES2.019 Transport of oxygen radicals in a slender glass tube of a microwave remote plasma source

K. Sasaki, K. Takizawa (Nagoya University, Japan)

ES2.020 Plasma Chemistry

ES2.021 Kinetics of OH radicals involved in the removal of acetaldehyde by a photo-triggered discharge in N2/O2/CH3CHO mixtures

L. Magne (LPGP, Univ. Paris-Sud, CNRS, France), J. Amorim (ITA-CTA Sao Jose Dos Campos, Brasil), V. Edon, S. Pasquiers, F. Jorand, C. Postel (LPGP)

ES2.022 Interaction between hollow needles – electric field, light emission and ozone generation study in multineedle to plate electrical discharge

Vitezslav Kriha (Czech Technical University Prague)

ES2.023 Production and loss kinetics of SiClx (x<3) etch products in high density HBr/Cl2/O2 plasmas

Gilles Cunge (Laboratoire des Technologies de la Microélectronique, 17 rue des Martyrs, 38054 Grenoble, France), Martin Kogelschatz, Nader Sadeghi (Laboratoire de Spectrométrie Physique, 38402 St Martin d'Hères, France)

ES2.024 Lumped circuit model of a plasma system grounded through a lossy dielectric

T. Abu Shemala, M. M. Turner, M. B. Hopkins, A. R. Ellingboe (Dublin City University, Ireland)

ES2.025 Dimensions of Plasma Boundary Region in Collisionless and Collisional Plasmas

Akihiro Kono (Nagoya University)

ES2.026 Streaming Instabilities in Negative Ion Plasmas

Glenn Joyce (Icarus Research Inc., Washington DC), Richard F. Fernsler, Steven P. Slinker (Plasma Physics Division, Naval Research Laboratory, Washington DC)

ES2.027 Stable and unstable operation of a chlorine-based ICP

C.S. Corr (LPTP, Ecole Polytechnique, France), P.G. Steen (School of Physical Sciences, DCU, Ireland), W.G. Graham (Queen's University Belfast, Northern Ireland)

ES2.028 Distribution function and instabilities in high power microwave produced plasmas

Babak Shokri (Laser Research Institute)

ES2.029 Modelling of collective effects in the multiphoton ionization of atomic deuterium.

Francesco Giammanco (University of Pisa, Italy), Brian Shortt, Peter van der Burgt (National University of Ireland, Maynooth)

ES2.030 Interaction of charged-particle beams with neutral gas over six decades of gas pressure and five decades of beam intensity

Strasburg Sean, Mosher Dave, Schumer Joseph, Ottinger Paul, Swanekamp Steven (Naval Research Laboratory)

ES2.031 Hyper-Thermic Atomic Beam Source For Surface Studies

Tatiana Babkina, Timo Gans, Uwe Czarnetzki (Institut für Plasma- und Atomphysik, Ruhr-Universität Bochum, Germany)

ES2.032 MODELLING OF ION NEUTRALIZATION FOR PLASMA ETCHING

Aleksandra Stojkovi\'c, Marija Radjenovi\'c-Radmilovi\'c, Zoran Petrovi\'c (Institute of Physics, P.O.B. 68, 11080 Belgrade, Serbia and Montenegro), Nata\vsa Nedeljkovi\'c, Lj. Nedeljkovi\'c (Faculty of Physics, University of Belgrade 11000 Serbia and Montenegro)

ES2.033 Effect of Different Chamber Wall Materials on ICP Discharge Parameters

Yi-Kang Pu, Zhen-Dong Yu, Zhi-Gang Guo, Jie Ma (Department of Engineering Physics, Tsinghua University)

ES2.034 Application of Atmospheric Corona Discharge for PES Fabric Modification

Jan Pichal, Jan Koller, Ludek Aubrecht (Department of Physics, CTU FEE Prague, Czech Repulic)