Program overview

SUNDAY AFTERNOON, 26 SEPTEMBER 2004

Session DS1. Optical Emission Diagnostics.

Sunday afternoon, 16:00, Belfast Room, Bunratty Conference Centre

16:00 DS1.001 Temporally and spatially resolved measurements of plasma breakdown
Mark Bowden (Dept. of Applied Physics, Eindhoven University of Technology, Netherlands)
16:30 DS1.002 The use of multiple helium line ratios as a plasma diagnostic tool.
Patrick Mc Carthy, Richard Armstrong, Cathleen O'Neill (Department of Physics, University College Cork, Association EURATOM DCU, Cork, Ireland), Martin O'Mullane (Department of Physics, University of Strathclyde, Glasgow G4 ONG, U.K.)
16:45 DS1.003 Fluorine and Oxygen Monitoring in Plasma CVM Etching Process for Silicon Wafer by Argon Actinometry Technique
Yasushi Oshikane, Akihiko Nagao, Kazuya Yamamura (Grad. School of Eng., Osaka Univ.), Akinori Oda (Grad. School of Eng., Nagoya Inst. of Technol.), Katsuyoshi Endo (Grad. School of Eng., Osaka Univ.)
17:00 DS1.004 Radially Resolved Rotational Temperature Profiles in a Hydrogen Inductively Coupled Plasma
V. Schulz-von der Gathen, M. Abdel-Rahman, T. Gans, H.F. Döbele (Universität Duisburg-Essen, Inst. f. Experimentelle Physik, 45117 Essen, Germany)

Session DS2. Interactions With Molecules.

Sunday afternoon, 16:00, Dublin Room, Bunratty Conference Centre

16:00 DS2.001 Ionization in Strong Electric Fields
Ian Williams (Queen's University Belfast)
16:30 DS2.002 3DW and DWIA Calculation of Electron-Impact Ionization of Molecules
Junfang Gao, Don H. Madison, Jerry L. Peacher (Physics department of University Missouri-Rolla)
16:45 DS2.003 Electron Scattering from Plasma Processing Gases: C2F4 and c-C4F8
Milica Jelisavcic, Radmila Panajotovic, Stephen Buckman (Australian National University, Canberra)
17:00 DS2.004 Density functional theory for low-energy electron-molecule scattering
Kieron Burke, Adam Wasserman (Department of Chemistry and Chemical Biology, Rutgers University, USA)
17:15 DS2.005 Electron and Positron Scattering from C3H6 Isomers
Casten Makochekanwa (Graduate School of Sciences, Kyushu University, Fukuoka 812-8581, Japan, and Physics Department, Sophia University, Chiyoda-ku, Tokyo 102-8554, Japan), Osamu Sueoka, Mineo Kimura (Graduate School of Sciences, Kyushu University, Fukuoka 812-8581, Japan), Masamitsu Hoshino, Takahiro Tanaka, Masashi Kitajima, Hiroshi Tanaka (Physics Department, Sophia University, Chiyoda-ku, Tokyo 102-8554, Japan)