Program overview

TUESDAY EVENING, 21 OCTOBER 2003

GTP.001 Inductively Coupled Plasmas

GTP.002 Global Model of Time-Modulated Electronegative Discharges for Neutral Radical and Electron Temperature Control

Sungjin Kim, M.A. Lieberman, A.J. Lichtenberg (University of California, Berkeley)

GTP.003 Self-Consistent Simulations of Inductively Coupled Discharges at Very Low Pressures Using a FFT Method for Calculating the Non-local Electron Conductivity for the General Case of a Non-Uniform Plasma

Oleg Polomarov, Constantine Theodosiou (University of Toledo), Igor Kaganovich (Princeton University)

GTP.004 Numerical Study of SF6 Plasma Characteristics at Different Operating Conditions

Ning Zhou (nz@cfdrc.com, CFD Research Corp), V Kolobov (CFD Research Corp), R Arslanbekov (CFD Research)

GTP.005 Low-frequency inductively coupled plasmas: plasma parameters and potential industrial applications

K. Ostrikov, S. Xu (Plasma Sources and Applications Center, NIE, Nanyang Technological University, 637616 Singapore)

GTP.006 A Variable Frequency Tuning Scheme for Inductive Plasma Sources

Kaveh Niazi, Zhan Chen, Oleh Karpenko (Intel Corporation)

GTP.007 Characterisation of an inductively coupled oxygen discharge

Philip Steen, Cormac Corr, Sergi Gomez, Gary Craig, Bill Graham (Queen’s University of Belfast, BT7 1NN, UK)

GTP.008 Real-time Monitoring of Drifting Ion Flux and Ion Energy in a High-Density, Inductively Coupled Plasma

Mark Sobolewski (National Institute of Standards and Technology)

GTP.009 On the electron heating mechanism in low pressure high density inductively coupled plasma(ICP)

K.-I You (Korea Basic Science Institute), W. K Kim, ChinWook Chung (Dept. of Electrical and Computer Engineering, HanYang University)

GTP.010 Material Processing I

GTP.011 Reactive RF plasma growth of highly transparent (002) AlN films

Chandru Mirpuri, S. Y. Huang, J. D. Long, K. Ostrikov, S. Xu (Advanced Materials and Nanostructures Laboratory, NIE, Nanyang Technological University, 637616 Singapore)

GTP.012 A VHF-UHF Etch System with High Density, Low Electron Temperature and Radially Adjustable Uniformity

John H Keller (K2 Keller Coulting, LLC)

GTP.013 Etching with Electron Beam-Generated Ion-Ion Plasmas

S.G. Walton, D. Leonhardt, C. Muratore, D.D. Blackwell, R.F. Fernsler (Plasma Physics Division, Naval Research Laboratory,Washington, DC 20375)

GTP.014 Deposition of High Quality Poly- and Micro-crystalline Silicon Films by a Surface-Wave Excited Plasma

HIROTAKA TOYODA, SATORU SOMIYA, HIDEO SUGAI (Department of Electrical Engineering, Nagoya University)

GTP.015 Study of corrosion protection of alumimium by siliconoxid-polymer coatings deposited by a dielectric barrier discharge under atmospheric pressure

J.F. Behnke, A. Sonnenfeld, O. Ivanova, R. Hippler (University of Greifswald, Institute of Physics, Germany), T. X. H. To, G. V. Pham, K. O. Vu, T. D. Nguyen (Institute for Tropical Technology, 18 Hoang Quoc Viet, Hanoi, Vietnam)

GTP.016 Instabilities in Reactive Discharges

GTP.017 Fusion Reactor Control

Dirk Plummer (DIRK ARNOLD PLUMMER, PE)

GTP.018 Non-local instability of low temperature plasma discharges

D. Mackey, L. Plantie, M. M. Turner (Dublin City University, Ireland)

GTP.019 Computational Methods for Plasmas

GTP.020 Analysis of the role of metastables in the GEC reference cell in argon by means of 1-D PIC simulations

Laura Lauro-Taroni, Alec Goodyear, Raoul Franklin, Nicholas Braithwaite (The Open University, Oxford Research Unit)

GTP.021 Solution of multi-term time-dependent Boltzmann equation in moment representation and its application to numerical treatment of plasmas

Yuriy Sosov, Constantine Theodosiou (University of Toledo)

GTP.022 Some thoughts toward more reliable solution techniques for the Boltzmann equation

Edward Richley

GTP.023 Plasma Dynamics

GTP.024 Aerodynamic Boundary Layer Control Using EHD Effects of a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP)

J. Reece Roth, Raja Chandra Mohan Madhan, Manish Yadav, Jozef Rahel (University of Tennessee Plasma Sciences Laboratory, Department of Electreical and Computer Engineering, Knoxville, TN), Stephen P. Wilkinson (Flow Physics and Control Branch, NASA Langley Research Center, Hampton, VA), Subsonic Plasma Aerodynamics Team

GTP.025 Three-dimensional Flow Acceleration Using Plasma Aerodynamic Actuators

Jozef Rahel, J. Reece Roth, Xin Dai (University of Tennessee Plasma Sciences Laboratory, Department of Electrical and Computer Engineering, Knoxville, TN)

GTP.026 Acoustic shock wave induced strong double layers formation in the positive column.

Peter Bletzinger (ISSI, Dayton, OH), Biswa Ganguly, Alan Garscadden (Air Force Research Laboratory, WPAFB, OH)

GTP.027 Ozone Production

GTP.028 Experimental and theoretical study of atmospheric pressure oxygen discharge with dielectric barriers

TAKASHI KIMURA, YOSUKE HATTORI, AKINORI ODA (Nagoya Institute of Technology,Japan)

GTP.029 Modelling of Current Density Redistribution in Hollow Needle to Plate Electrical Discharge Designed for Ozone Generation

Vitezslav Kriha (Dept. of Physics, FEE CTU, Technicka 2, Prague, Czech Republic)

GTP.030 Effect of trigger electrodes configuration of a double discharge ozonizer on ozone generation characteristics

Mitsuaki Shimosaki, Nobuya Hayashi, Satoshi Ihara, Saburoh Satoh, Chobei Yamabe (Saga University)

GTP.031 Ozone Production by Atmospheric Pulsed Discharge Using a Partly Covered Electrode

Shunichi Kaneda, Nobuya Hayashi, Satoshi Ihara, Saburoh Satoh, Chobei Yamabe (Saga University)

GTP.032 Ozone Synthesis in DC Driven Micro Hollow Cathode Discharge

Atsushi Yamatake, Koichi Yasuoka, Shozo Ishii (Tokyo Institute of Technology)

GTP.033 Lighting Plasmas I

GTP.034 Simulation of plasma parameters in He-Xe gas mixtures and comparison with experiment

Yuriy Sosov, Constantine Theodosiou (University of Toledo)

GTP.035 Observations in a TmI^3-TlI-Hg metal-halide lamp and the influence of TmI^3

J. J. Curry, C. J. Sansonetti (NIST, Gaithersburg, MD USA), H. G. Adler (OSRAM SYLVANIA, 71 Cherry Hill Drive, Beverly, MA USA), M. Kaning, B. Schalk, L. Hitzschke (OSRAM GmbH, Munich, Germany), S. D. Shastri (Advanced Photon Source, Argonne National Laboratory, Argonne, IL USA)

GTP.036 EXCIMER EMISSION FROM CATHODE BOUNDARY LAYER DISCHARGES

M.M. Moselhy, J. Ansari, K.H. Schoenbach (Physical Electronics Research Institute, Old Dominion University, Norfolk, VA 23529, USA)

GTP.037 VUV Emissions from a High-Pressure Cylindrical Dielectric Barrier Discharge

N Masoud (Stevens Institute of Technology), K Martus (William Paterson University), K Becker (Stevens Institute of Technology)

GTP.038 High-pressure dielectric barrier discharge Xenon lamps generating short pulses of high-peak-power VUV radiation (172nm) with high pulse-to-pulse reproducibility.

Robert Carman, Barry Ward, Richard Mildren, Deborah Kane (Physics Dept, Macquarie University, North Ryde, Sydney, NSW 2109, Australia)

GTP.039 A nonlocal radiation transport and 1-D Boltzmann model for low pressure Hg-Ar discharges

J. Apruzese, J. Giuliani (Naval Research Laboratory, Washington, DC), G. Petrov (Berkeley Scholars, Inc., Springfield, VA)

GTP.040 Comparison of a 1-D radiation/Boltzmann model with fluorescent lamp data

G. Petrov (Berkeley Scholars, Inc., Springfield, VA), J. Giuliani (Naval Research Laboratory, Washington, DC)

GTP.041 Diagnostic Study and Self-Consistent Modelling of a Low-Pressure He-Xe Discharge for Lighting Purpose

René Bussiahn, Serguei Gortchakov, Hartmut Lange, Dirk Uhrlandt (Institut für Niedertemperatur-Plasmaphysik, Greifswald, Germany)

GTP.042 Transport Coefficients

GTP.043 Xe^+ and Ne^+ mobilities in Xe/Ne/He mixtures

E.-S. Et-touhami, L.C. Pitchford (CPAT, U. Paul Sabatier and CNRS, Toulouse, France), A.V. Phelps (JILA, U. of Colorado and NIST)

GTP.044 SPATIAL PROFILES OF EXCITATION IN HELIUM

\vZeljka Nikitivi\'c, Gordana Malovi\'c, Aleksandra Strini\'c, Petrovi\'c Zoran (Institute of Physics, University of Belgrade)

GTP.045 On the modification of the spatiotemporal electron relaxation process by electron-electron collisions

Detlef Loffhagen, Rolf Winkler (Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, Germany)

GTP.046 Factors of the Synergy Effect of Insulating Gas Mixtures

Takuya Ishigaki, Yuuki Hirochi, Hirotake Sugawara, Yosuke Sakai (Hokkaido University, Japan)

GTP.047 Glows

GTP.048 Investigation of field and plasma parameters near the slot antenna of a 915 MHz surface wave discharge

S Nakao, E Stamate, H Sugai (Nagoya University, Department of Electrical Engineering)

GTP.049 Characterization of a large-area microwave plasma in N_2-O_2

Elena Tatarova, Francisco M. Dias, Vasco Guerra, Carlos M. Ferreira (Centro de Física dos Plasmas, Instituto Superior Técnico, 1049-001 Lisboa, Portugal)

GTP.050 Wave Driven N2-O2 Discharges as Sources of Active Species

J. Henriques (CPAT, Université Paul Sabatier, 118 rte de Narbonne, 31062 Toulouse, France), E. Tatarova, CM. Ferreira (Centro de Física dos Plasmas, Instituto Superior Técnico, 1049-001 Lisboa, Portugal), A. Ricard (CPAT, Université Paul Sabatier, 118 rte de Narbonne, 31062 Toulouse, France)

GTP.051 Influence of electron collisions with N_2(A\ ^3\Sigma_u^+) metastables in the nitrogen afterglow

Vasco Guerra (Centro de Física dos Plasmas, Instituto Superior Técnico, 1049-001 Lisboa, Portugal), Paulo A. Sá (Departamento de Física, Fac. Eng., Universidade do Porto, 4200-465 Porto, Portugal), Jorge Loureiro (Centro de Física dos Plasmas, Instituto Superior Técnico, 1049-001 Lisboa, Portugal)

GTP.052 Dependence of Gas Temperature of Oxygen Plasma on Discharge Conditions

Koichi Naoi, Takeshi Sakamoto, Haruaki Matsuura, Hiroshi Akatsuka (Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology)

GTP.053 Pattern Formation in Cathode Boundary Layer Microdischarges

K.H. Schoenbach, M.M. Moselhy (Physical Electronics Research Institute, Old Dominion University, Norfolk, VA 23529, USA)

GTP.054 Capacitively Coupled Plasmas

GTP.055 Power dissipation characteristics of the dual-frequency capacitively coupled plasma.

Buil Jeon, Hong-Young Chang (Dept. of Physics, Korea Advanced Institute of Science and Technology.)

GTP.056 Langmuir Probe Studies In A Dual Frequency Etch Reactor

Douglas Keil, Eric A. Hudson, Wan-lin Chen, Reza Sadjadi (Lam Research Corporation), Lam Research Corporation

GTP.057 Comparision of Emissive Probe assisted Measurements of Plasma Density to that of a Surface Wave Probe, in a Dual Frequency Confined Capacitively Coupled Discharge

S. Linnane, A. R. Ellingboe (Dublin City University, Ireland)

GTP.058 Global Model for Asymmetric, Diode-Type Dual Frequency Capacitive Discharge

Jisoo Kim, M.A. Lieberman, A.J. Lichtenberg (University of California, Berkeley)

GTP.059 Particle-In-Cell Simulations of Asymmetric Dual Frequency Capacitive Discharge Physics

Alan Wu, A.J. Lichtenberg, M.A. Lieberman, J.P. Verboncoeur (University of California, Berkeley)

GTP.060 Kinetic simulations of capacitively coupled plasmas with external circuit

Robert Arslanbekov, Vladimir Kolobov, Ning Zhou (CFD Research Corp.)

GTP.061 Methods to Achieve Uniformity in High Frequency Sources

Daniel Hoffman (Applied Materials)

GTP.062 Effect of Driving Frequency on the EEDF of Capacitively-Coupled Argon Plasmas

KENICHI NANBU, HIDETO TAKEKIDA (Institude of Fluid Science), HOSOKAWA YOSHIYUKI (Kobelco System)

GTP.063 Measurement and modeling of voltage and plasma distribution of VHF-driven capacitively-coupled ladder-shaped electrode

Koji Satake, Hideo Yamakoshi, Matsuhei Noda (Mitsubishi Heavy Industries, Ltd., Japan)

GTP.064 The mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

ShinJae You (kaist), HyunChul Kim, JaeKu Lee (postech), HongYoung Chang (kaist), Kaist Team, Postech Team

GTP.065 Diagnostics I

GTP.066 Distributions of absolute C_2 and C_3 densities in low-pressure, high-density C_4F_8 plasmas measured by broadband absorption spectroscopy combined with laser-induced fluorescence

M. Aramaki, M. Kobayashi, K. Sasaki (Department of Electronics, Nagoya University, Nagoya 464-8603, Japan)

GTP.067 The measurement of ion drift velocity by Mach probes in unmagnetized plasmas

Eunsuk Ko, Xu Wang, Noah Hershkowitz (Dept. Engineering Physics, University of Wisconsin - Madison)

GTP.068 Emission spectroscopy of pulse electrical discharge in water solution

Milan Simek, Martin Clupek, Vaclav Babicky, Pavel Sunka (Institute of Plasma Physics, Za Slovankou 3, 18221 Prague 8, Czech Republic), Department of Pulse Plasma Systems Team

GTP.069 Effect of Kr Gas Dilution on O Atom Density in Inductively Coupled Kr/O_2 Plasma

MASARU HORI, SOICHI IKUMA, TOSHIO GOTO (Dept. of Quantum Eng., Nagoya University)

GTP.070 Energy Distribution Measurement of Atoms and Ions Sputtered by a Magnetron Plasma

H. MATSUI, H. TOYODA, K. SHIBAGAKI, K. SASAKI, T. KATO, S. IWATA, S. TSUNASHIMA, H. SUGAI (Nagoya University)

GTP.071 Electron Collisions

GTP.072 A New Method for Measuring Absolute Cross Sections for Electron Impact Ionization of High Rydberg Atoms

K. Nagesha, K.B. MacAdam (Dept. of Physics and Astronomy, University of Kentucky, Lexington KY 40506-0055)

GTP.073 Magnetic Resonance of short-lived negative ions

Emil Toader (University of Bucharest, Romania), Kenneth Stalder (Stalder Technologies, Redwood City, CA), Bill Graham (Queen's University Belfast, Northern Ireland)

GTP.074 Quantal and Classical Radiative Cascade in Ultracold Rydberg Plasmas

M. Raymond Flannery (Georgia Institute of Technology), Daniel Vrinceanu (ITAMP, Harvard University)

GTP.075 Energy Exchange Processes in Optically Pumped Carbon Monoxide Plasmas

Yuri Utkin, Igor Adamovich, William Rich (Dept. of Mechanical Engineering, The Ohio State University)

GTP.076 Vibrationally Excited N_2 in Our Thermosphere

Laurence Campbell (SoCPES, Flinders Uni, GPO Box 2100, Adelaide, SA 5001, Australia), David Cartwright (Theoretical Division, Los Alamos National Laboratory, New Mexico, NM87545, USA), Michael Brunger, Peter Teubner (SoCPES, Flinders Uni, GPO Box 2100, Adelaide, SA 5001, Australia)

GTP.077 Calculated Cross Sections for the Electron-Impact Detachment from Negative Ions Using the Deutsch-Märk (DM) Formalism

H. Deutsch (Universitaet Greifswald, Germany), P. Scheier (Universitaet Innsbruck, Austria), K. Becker (Stevens Institute of Technology, USA), T. Maerk (Universitaet Innsbruck, Austria)