Program overview

TUESDAY MORNING, 21 OCTOBER 2003

10:00 CT1.001 Low temperature plasmas in carbon nanotube growth and functionalization

M. Meyyappan (NASA Ames Research Center)

10:30 CT1.002 Carbon nanotubes as robust electron field emitters in gaseous and vacuum environments

Otto Zhou (University of North Carolina)

11:00 CT1.003 PECVD of self-assembled ordered carbon nanotip arrays in high density inductively coupled plasmas

Z Tsakadze, S Xu, J Long, K Ostrikov (Plasma Sources and Applications Center, NIE, Nanyang Technological University, 637616 Singapore), R Storer (Flinders University,GPO Box 2100,Adelaide 5001 SA, Australia)

11:15 CT1.004 Stability of atmospheric pressure glow discharge and application to carbon nanotube deposition

Tomohiro Nozaki (Tokyo Institute of Technology, University of Minnesota (Twin cities)), Ken Okazaki (Tokyo Institute of Technology), Uwe Kortshagen, Joachim Heberlein (University of Minnesota (Twin cities))

11:30 CT1.005 Gas-surface kinetics modeling for carbon nanotube deposition

D. B. Hash, T. R. Govindan, M. Meyyappan (NASA Ames Research Center), Deepak Bose (Eloret Corporation)

10:00 CT2.001 Generation of uniform, large area VHF capacitive plasma using phase-modulation and two-frequency technique

Hideo Yamakoshi, Koji Satake, Hiroshi Mashima, Yoshiaki Takeuchi, Masayoshi Murata, Tatsufumi Aoi (Mitsubishi Heavy Industries, Ltd., Japan), Taro Uchiyama (Keio Univ., Japan)

10:15 CT2.002 Non-uniformities in large-area high-frequency capacitive discharges

Amelie PERRET, Pascal CHABERT, Jacques JOLLY, Jean-Paul BOOTH, Jean GUILLON (Laboratoire de Physique et Technologie des Plasmas, UMR 7648, Ecole Polytechnique, 91128 Palaiseau, France)

10:30 CT2.003 The role of secondary electron emission and electron heating in RF plasmas

Alec Goodyear, Paulo Lima, Nicholas Braithwaite (The Open University, Oxford Research Unit)

10:45 CT2.004 One-dimensional fluid simulations of very low-pressure, high-frequency, capacitively coupled plasma discharges

Guangye Chen, Laxminarayan L. Raja (The University of Texas at Austin)

11:00 CT2.005 2-D simulations of capacitively coupled RF plasmas: influence of process parameters

Tatiana Novikova (LPICM, Ecole Polytechnique, 91128 Palaiseau Cedex France), Billel Kalache (LIMHP, Université Paris-Nord, 93430, Villetaneuse, France), Pavel Bulkin (LPICM, Ecole Polytechnique, 91128 Palaiseau Cedex France), Khaled Hassouni (LIMHP, Université Paris-Nord, 93430, Villetaneuse, France), Pere Roca i Cabarrocas (LPICM, Ecole Polytechnique, 91128 Palaiseau Cedex France)

11:15 CT2.006 Acceleration to periodic steady-state for multi-dimensional radio-frequency plasma discharge simulations

Edward Hammond, Parviz Moin (Stanford University)

11:30 CT2.007 Effective Frequency Concept for Dual Radio-Frequency Discharges

HyunChul Kim, JaeKoo Lee (Dept. of Electronic and Electical Engineering, Pohang University of Science and Technology, Pohang, Korea), JongWon Shon (Lam Research Corporation, Fremont, CA, U.S.A.)