Program overview

WEDNESDAY AFTERNOON, 16 OCTOBER 2002

13:15 NW1.001 Submillimeter Absorption Spectroscopy of Fluorocarbon Plasmas

Eric Benck, Guerman Golubiantnikov, Gerald Fraser, David Plusquellic, Timothy Korter, Rich Lavrich, Vyatcheslav Bychkov (National Institute of Standards and Technology)

13:30 NW1.002 Neutral Heating and Neutral Temperature Measurement in Inductively Coupled Fluorocarbon Discharges

Brett Cruden, David Hash, M V V S Rao, Surendra Sharma, M Meyyappan (NASA Ames Research Center)

13:45 NW1.003 Temperature effects on CF_x kinetics in a pulsed ICP in CF_4 .

Jean-Paul Booth, Hana Abada, Pascal Chabert (LPTP, Ecole Polytechnique, France)

14:00 NW1.004 Temperature Mapping in CF_4 Plasmas using Planar Laser-Induced Fluorescence

Kristen L. Steffens, Mark A. Sobolewski (National Institute of Standards and Technology)

14:15 NW1.005 Measurement of hydrogen atom density in high-density CF_4/H_2 plasmas by (2+1)-photon laser-induced fluorescence spectroscopy

K. Sasaki, M. Okamoto, K. Kadota (Department of Electronics, Nagoya University, Japan)

14:30 NW1.006 Kinetics of SiF_x(x=0-2) and SiF_4 molecule in RF 60MHz parallel-plate capacitively coupled plasma employing SiF_4

Masaru Hori, Takayuki Ohta, Kenichiro Hara, Toshio Goto (Dept. of Quantum Eng., Nagoya Univ., Japan), Masahumi Ito (Dept. of Opto-Mechatronics Faculty of Systems Eng., Wakayama Univ., Japan), Satoshi Kawakami (Tokyo Electron Tohoku Co. Ltd., Japan), Nobuo Ishii (Central Research Lab., Tokyo Electron Co. Ltd., Japan)

14:45 NW1.007 A Combined Diode Laser Absorption and Optical Emission Spectroscopic Studies of Free Radicals in N_2/SiCl_4 Discharges

Peng Li, Wai Yip Fan (Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore, 117543)

13:15 NW2.001 On the Physics of High Intensity Discharge Lamp Electrodes

Juergen Mentel (Ruhr-University of Bochum, Germany)

13:45 NW2.002 Physics and Chemistry of Ultra-High-Pressure Mercury Discharge Lamps

Ulrich Hechtfischer (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany)

14:15 NW2.003 X-ray Absorption Imaging of High-Intensity Discharge Lamps Using Monochromatic Synchrotron Radiation

John J. Curry, Craig J. Sansonetti (National Institute of Standards and Technology, Gaithersburg, MD 20899), Ulrich Hechtfischer (PHILIPS Research, Aachen, Germany), Helmar G. Adler (OSRAM SYLVANIA, Beverly, MA 01915)

14:30 NW2.004 Self-consistent modeling of diffuse and spot modes on thermionic arc cathodes

M. S. Benilov, M. D. Cunha (Departamento de Física, Universidade da Madeira, Largo do Município, 9000 Funchal, Portugal)

14:45 NW2.005 Infrared emission in metal-halide arc lamps

D. J. Smith, G. A. Bonvallet, J. E. Lawler (Univ. of Wisconsin-Madison)