FRIDAY MORNING, 12 OCTOBER 2001

Session RF1. Plasma Diagnostic V.

Friday morning, 10:00, Ballroom C, Nittany Lion Inn

10:00 RF1.001 A new method of electron temperature measurement in Si process plasmas: Takeshi K.Gotoh^\ast, Toshiaki Makabe (Keio university at Yokohama, Japan)
10:15 RF1.002 A seven harmonic actively compensated Langmuir probe for the GEC Cell: A. Goodyear, L. Nolle, A.A. Hopgood, P.D. Picton, N. Braithwaite (The Open University, Oxford Research Unit, Boars Hill, Oxford, OX1 5HR, UK)
10:30 RF1.003 Microwave Interferometer for Steady-State Plasmas: Earl Scime, Robert Boivin, John Kline (Department of Physics, West Virginia University), Matthew Balkey (Naval Research Laboratory)
10:45 RF1.004 Ion Flux Measurements in Electron Beam Produced Plasmas in Atomic and Molecular Gases: S.G. Walton, D. Leonhardt, D.D. Blackwell, D.P. Murphy, R.F. Fernsler, R.A. Meger (Plasma Physics Division, Naval Research Laboratory, Washington, DC 20375)
11:00 RF1.005 Electron Beam Diagnostics in Plasmas Based on Electron Beam Ionization: Darrin Leonhardt, Edbertho Leal-Quiros, David Blackwell, Scott Walton, Donald Murphy, Richard Fernsler, Robert Meger (US Naval Research Laboratory, Plasma Physics Division)
11:15 RF1.006 Ions Near Bumps - Experimental measurements of ion trajectories near surface features on rf-biased wafers: J. R. Woodworth (Sandia National Laboratories), I. C. Abraham, P. A. Miller, R. J. Shul, B. P. Aragon, T. W. Hamilton (), C. G. Willison (Sandia National Laboratories)
11:30 RF1.007 Electron Collision Excitation Rate and Electron Density in a Rare Gas Discharge: M. A. Bratescu, Y. Sakai, M. Yanagida (Hokkaido University, Sapporo 060-8628, Japan)

Session RF2. Low and Ultralow Energy Electron-Molecule Interactions.

Friday morning, 10:00, Ballroom A, B, Nittany Lion Inn

10:00 RF2.001 Attachment of slow electrons to molecules and clusters at high energy resolution: Aschwin Gopalan (Universität Kaiserslautern, Fachbereich Physik, D-67663 Kaiserslautern, Germany)
10:30 RF2.002 Dissociative Electron Attachment in the condensed phase: sample morphology and bio-molecules: A.D. Bass (Groupe des Institues de Recherche en Santé du Canada en Sciences des Radiations, Dépt. de Médecine Nucléaire et de Radiobiologie, Faculté de Médecine, Université de Sherbrooke, Sherbrooke, Quebec, CANADA.)
11:00 RF2.003 Electron Transport Properties and Collision Cross Sections in C2F4: K. Yoshida, S. Goto (Kitami Institute of Technology), H. Tagashira (Muroran Institute of Technology), C. Winstead, B.V. McKoy (California Institute of Technology), W.L. Morgan (Kinema Research amp; Software)
11:15 RF2.004 Electron Interactions with BCl_3: Loucas Christophorou, James Olthoff (NIST)
11:30 RF2.005 Observation of the Even Rotational States of the Helium Molecular Ion: C. Caraballo, M. Faxas, A. Pacheco, J. Rojas, L. Simons, K. Hardy (Florida International University)
11:45 RF2.006 Ion-Ion Plasmas Produced by Electron Beams: R. F. Fernsler, D. Leonhardt, S. G. Walton, R. A. Meger (Plasma Physics Division, Naval Research Laboratory)