Program overview

TUESDAY MORNING, 9 OCTOBER 2001

Session BT1. GEC: Dusty Plasmas and Plasmas for Nanostructured Materials.

Tuesday morning, 10:00, Ballroom AB, Nittany Lion Inn

10:00 BT1.001 Waves in a 2D Dusty Plasma Crystal
J. Goree (Dept. of Physics and Astronomy, Univ. of Iowa), S. Nunomura, V. Nosenko
10:15 BT1.002 Compressional and Shear Wakes in a 2D Dusty Plasma Crystal
V. Nosenko, J. Goree, Z.W. Ma (Dept. of Physics and Astronomy, Univ. of Iowa), D.H.E. Dubin (Dept. of Physics, UCSD)
10:30 BT1.003 Formation of Coulomb Crystals Having Multiple Lattices and Translational Motion in Dusty Plasmas
Vivek Vyas, Mark J. Kushner (University of Illinois)
10:45 BT1.004 Determination of Plasma Dust Particle Interactions Confined within a Layer
M. E. Riley (Sandia National Labs (SNL)), G. A. Hebner (SNL), D. Johnson (Univ. of Illinois), P. Ho, R. J. Buss (SNL)
11:00 BT1.005 Effect of Trapped Ions on Shielding and Floating Potential of a Dust Grain in a Plasma
Martin Lampe, Gurudas Ganguli, Glenn Joyce (Naval Research Laboratory, Washington, DC), Valeriy Gavrishchaka (SAIC, McLean, VA)
11:15 BT1.006 Materials Deposition on Trapped Particles in a Dusty PECVD
Jin Cao, Themis Matsoukas (Department of Chemical Engineering, The Pennsylvania State University, University Park, PA 16802)
11:30 BT1.007 Influence of the dynamic expansion of laser-produced gold plasmas on nanostructured thin films grown in various atmospheres
B. Le Drogoff, E. Irissou, M. Chaker, D. Guay (INRS - Energie et Materiaux - Qc, Canada), M. Trudeau (IREQ - Qc, Canada.)
11:45 BT1.008 Angular Motion of Dust Particles and Evolution of Dust Void in Plasmas
R.P. Dahiya, G. Paeva, W.W. Stoffels, E. Stoffels, G.M.W. Kroesen (Department of Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, Netherlands)

Session BT2. GEC: Plasma Modeling: Needs and Opportunities.

Tuesday morning, 10:00, Ballroom C, Nittany Lion Inn

10:00 BT2.001 Vertically integrated computer aided design for device plasma processing
~T. Makabe, K. Maeshige (Keio University at Yokohama, Japan)
10:15 BT2.002 Development of Self-Consistent Electron Collision Cross Sections and Validation of Plasma Chemistry Models
W. L. Morgan, G. I. Font (Kinema Research, L.L.C.)
10:30 BT2.003 On improving the continuum models for simulation of low temperature plasma discharges
Deepak Bose (Eloret Corp.), David Hash, T.R. Govindan, M. Meyyappan (NASA Ames Research Center)
10:45 BT2.004 A Comparison of Three Methods for Feature Profile Evolution
H.\ H. Hwang (NASA Ames Research Center), S. Rauf, P.\ J. Stout (Motorola Inc.)
11:00 BT2.005 Plasma Molding over Surface Topography: IED and IAD over Steps
Demetre Economou, Doosik Kim (University of Houston)
11:15 BT2.006 A Modeling Comparison of Ionized Physical Vapor Deposition and High Power Magnetron Deposition of Cu
Phillip Stout, Da Zhang, Shahid Rauf, Peter L. G. Ventzek (motorola)
11:30 BT2.007 Multi-Dimensional Simulations of Fluorocarbon Plasmas with Ion Energy Resolved Surface Reaction Rates
Ning Zhou, Vladimir Kolobov (CFD Research Corp), Vladimir Kudriavtsev (CFD Canada)