Program overview

TUESDAY EVENING, 24 OCTOBER 3900

ETP.001 RF Glows

ETP.002 2D-t modeling of a pulsed ICP with biased wafer in CF_4/Ar

T. Shiraki (Department of Electronics and Electrical Engineering,Keio University at Yokohama,Japan)

ETP.003 2D-t modeling of pulsed-2f-CCP in CF_4(5%)/Ar for oxide etching

G. Washio, K. Maeshige, N. Nakano, T. Makabe (Department of Electronics and Electrical Engineering, Keio University at Yokohama, Japan)

ETP.004 Two-dimensional modeling of RF capacitively coupled discharges

A. Salabas (CFP, IST (Portugal)), G. Gousset (LPGP, Univ. Paris-Sud (France)), L.L. Alves (CFP, IST (Portugal))

ETP.005 CF_2 detection in radio-frequency discharges containing c-C_4F_8

A. N. Goyette, Yicheng Wang (National Institute of Standards and Technology)

ETP.006 Increase in Plasma Density using Plasma-Sheath Resonance in a Capacitively Coupled Plasma

N. Goto, T. Makabe (Keio University)

ETP.007 Decomposition Rate of CO_2 in a CCRF Discharge

T. Dinh, S. Popovi\'c, L. Vu\vskovi\'c (Department of Physics, Old Dominion U., Norfolk, VA 23529)

ETP.008 Radio Frequency Biasing of an Ion-Ion Plasma

Vikas Midha, Badri Ramamurthi, Demetre Economou (Department of Chemical Engineering, University of Houston, Houston, TX 77204-4792)

ETP.009 Development of compact RF plasma source using electron sheath resonance technique

Yasunori Ohtsu, Yousuke Inoue, Hiroharu Fujita (Department of Electrical and Electronic Engineering, Saga University, 1 Honjo-machi, Saga 840-8502, Japan), Fujita Lab. Team

ETP.010 Decoupling characteristics of different frequency power supply for dual frequency capacitive coupling plasma reactor

Nobuhiko Nakano, Toshiaki Makabe (Keio University)

ETP.011 Effect of Metastable Atoms in an RF Argon Discharge

Marisa Roberto (ITA), Helen Smith (UCBerkeley)

ETP.012 A Monte Carlo Collison Model to Study RF Discharges with a Mixture of Argon and Oxygen

Marisa Roberto (ITA), Helen Smith (UCBerkeley)

ETP.013 DC Glows

ETP.014 Electron and Excited Particle Kinetics in Axially Symmetric Hollow Cathodes

F. Sigeneger, S. Gortchakov, R. Winkler (Institut für Niedertemperatur-Plasmaphysik, Greifswald, Germany), S. Pfau (Institut für Physik, Greifswald, Germany)

ETP.015 Formation of Negative Hydrogen Ions in a Ne-H2 Hollow Cathode Discharge

Tsvetelina Petrova (University of Sofia), George Petrov (Berkeley Research Associates, Inc.)

ETP.016 Interaction Between Acoustic Shock Wave and Glow Discharge

S. Popovi\'c, L. Vu\vskovi\'c (Department of Physics, Old Dominion U., Norfolk, VA 23529)

ETP.017 Experimental and Theoretical Study of Electrons and Excited Atoms in a Neon DC Column Plasma

Dirk Uhrlandt, Martin Schmidt (Institut für Niedertemperatur Plasmaphysik, 17489 Greifswald, Germany), Andreas Dinklage, Steffen Franke, Matthias Otte, Samir Solyman, Christian Wilke (Institut für Physik, E.-M.-Arndt-Universität, 17487 Greifswald, Germany)

ETP.018 Microwave Glows

ETP.019 Single Surface Multipactor Experiment on a Dielectric Surface

R. B. Anderson, W. Getty, M. L. Brake, Y. Y. Lau, R. M. Gilgenbach, A. Valfells, S. A. Anderson (University of Michigan)

ETP.020 Glows

ETP.021 Generation of High-Pressure, High-Density, Non-Equilibrium Plasma Using Microwave-Excited Microgap Discharge

A. Kono, T. Sugiyama, T. Goto (Nagoya University, Nagoya 464-8603, Japan), H. Furuhashi, Y. Uchida (Aichi Institute of Technology, Toyota 470-0392, Japan)

ETP.022 Modelling of excitation and ionization processes in homogenous APDG in nitrogen.

Y.B. Golubobskii, V. Maiorov (Institute of Physics, State University of St. Pertersburg, Russia), J. Behnke, J.F. Behnke (Institute of Physics,, 17487 Greifswald,)

ETP.023 Spectroscopic characterisation of an atmospheric pressure glow discharge (APGD)

S. Gomez, P.G. Steen, T. Morrow, W.G. Graham (Dept. of Pure and Applied Physics, The Queen's University, Belfast BT7 1NN, Northern Ireland), P.A.F. Herbert (Plasma Ireland Ltd., Cork, Ireland)

ETP.024 Modeling of Uniform and Filamentary Dielectric Barrier Discharges in Helium at Atmospheric Pressure

Vitaly A. Schweigert, Uwe Kortshagen (University of Minnesota, Mechanical Engineering)

ETP.025 Dielectric Barrier Discharge in Nitrogen: Transition from the Filamentary to the Glow Mode

Hans-Erich Wagner, Ronny Brandenburg (Affiliation), Peter Michel (Institute of Physics, Ernst-Moritz-Arndt University of Greifswald, 17489 Greifswald, Domstr. 10a, GERMANY), Francoise Massines (Laboratoir de Genie Electrique de Toulouse, Universite Paul Sabatier 118, route de Narbonne, 31062 Toulouse Cedex, FRANCE), Kirill V. Kozlov (Moscow State University, Department of Chemistry, 119899 Moscow, RUSSIA)

ETP.026 Kinetic properties and convergence of particle simulation of discharges

M M Turner (Dublin City University, Ireland)

ETP.027 Plasma-Surface Interaction

ETP.028 2D profiles of a pulsed-two-frequency CCP by emission selected CT

T. Fujita, T. Mano (Keio University at Yokohama, Japan)

ETP.029 A modified Gaseous Electronics Conference Reference Cell for the study of plasma-surface-gas interactions.

M.J. Goeckner, J.M. Marquis, B.J. Markham, A.K. Jindal (Electrical Engineering, University of Texas at Dallas)

ETP.030 A Flexible Plasma System for the study of plasma-surface-gas interactions.

A.K. Jindal, J.M. Marquis, B.J. Markham, M.J. Goeckner (Electrical Engineering, University of Texas at Dallas)

ETP.031 Electron-Stimulated Desorption from the Products of Chemisorption of C_2F_3Cl and C_2Cl_4 on Si(100)

Jason E. Sanabia (Chemical Physics Program), Gregory D. Cooper (Department of Physics), Jon Orloff (Department of Electrical and Computer Engineering), John H. Moore (Department of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742.)

ETP.032 Experimental Measurements of Plasma-Grid Interaction

Chang-Koo Kim, Demetre Economou (University of Houston, Department of Chemical Engineering, Houston, TX 77204-4792)

ETP.033 Structures of energy dissipation of plasma in a thin discharge cell

Nariaki Imamura, Jyun Sakaguchi, Syu-ichiro Asatani, Kozo Obara (Kagoshima University)

ETP.034 Electron and Photon Collisions

ETP.035 Benchmark Calculations for Electron Collisions with Noble Gases

Klaus Bartschat (Drake University)

ETP.036 Electron Impact Excitation Collision Strengths for Fe X

Swaraj Tayal (Clark Atlanta University)

ETP.037 Formation of Ground-State Si Atoms Following Electron Impact Dissociation of SiH4 and SiF4

Nina Abramzon, Thomas Raynor, Kurt Becker (Stevens Institute of Thechnology, Hoboken, NJ), Kevin Martus (William Paterson University, Wayne, NJ)

ETP.038 Electron Impact Ionization of TiClx(x=1-3)

R Basner, M Schmidt (INP Greifswald, Germany), H Deutsch (Univ. Greifswald, Germany), V Tarnovsky, Kurt Becker (Stevens Institute of technology, Hoboken, NJ)

ETP.039 Electron-Impact Total Ionization Cross Section for TiCl_4

M. A. Ali (Howard Univ.), K. K. Irikura, Y.-K. Kim (NIST)

ETP.040 Low Energy Positron Scattering from Atoms and Molecules

J.P. Sullivan, S.J. Gilbert, C.M. Surko (University of California, San Diego)

ETP.041 Heavy Particle Collisions

ETP.042 Alignment and Orientation dependence of inelastic cross sections in slow Li+He collisions.

Bidhan Saha (Florida A&M University)

ETP.043 Electron Transfer To Spatially Oriented Molecules

Jiping Zhan, Beike Jia, Philip R. Brooks (Rice University)

ETP.044 Cross Sections for Elastic Collisions between Rare Gas Atoms from 0.01 eV to 10 keV.

A.V. Phelps (JILA, U. of Colorado and NIST)

ETP.045 Studies of Charge Exchange Interactions between Protons and Gas Targets.

David Bixler (Angelo State University)

ETP.046 Doubly differential cross sections and longitudinal momentum distributions in the single ionization of Ne by fast ion impact

D.M. McSherry, S.F.C. O'Rourke, D.S.F. Crothers (DAMTP, The Queen's University of Belfast, N.Ireland, BT7 1NN)

ETP.047 Diagnostics: Electrical Methods

ETP.048 Langmuir Probe Measurements in Inductively Coupled CHF_3/Ar and CHF_3/O_2/Ar plasmas

S.P. Sharma, M.V.V.S. Rao*, M. Meyyappan (NASA-Ames Research Center)

ETP.049 Diagnostics for Electron-Beam Produced Process Plasmas

David D. Blackwell, Scott G. Walton, Darrin Leonhardt, Donald P. Murphy, Richard F. Fernsler, William E. Amatucci, Robert A. Meger (Plasma Physics Division, U.S. Naval Research Laboratory, DC 20375-5346), Edbertho Leal-Quiros (Polytechnic University of Puerto Rico, Hato Rey, PR 00918)

ETP.050 External RF Filtering for Langmuir Probes

Amy Wendt (University of Wisconsin - Madison)

ETP.051 Electrical Structure and Charged Particle Fluxes in SF_6/Ar Plasmas

P.B Verdonck, A. Goodyear, P.R.J. Barroy, N.St.J. Braithwaite (The Open University)

ETP.052 Time resolved electron and temperature measurements in a pulsed planar microwave discharge

A. Rousseau, E. Teboul (LPGP, Université Paris-Sud / CNRS, France), N. Lang, J. Roepcke (INP Greifswald, Germany)

ETP.053 Measurement of Electron Densities in a Pulsed Atmospheric Pressure Air Discharge

Frank Leipold, Robert H. Stark, Karl H. Schoenbach (Old Dominion University, Physical Electronics Research Institute, Norfolk, VA 23529)

ETP.054 Diagnostics: Optical Methods

ETP.055 CF, CF_2 and SiF densities in inductively driven discharges

Greg Hebner (Sandia National Laboratories, Albuquerque NM)

ETP.056 An Electric Field Measurement Method based on Spectroscopy of Argon Atoms

V.P. Gavrilenko, H.J. Kim, J.B. Kim, M.D. Bowden, K. Muraoka (Kyushu University, Japan)

ETP.057 Correlation between Gas Phase and Substrate Surface on Fabrication of Low-k Films in ECR Plasma with C_4F_8 and Perfluorocarbon-Replacement Gases

MASAYUKI NAKAMURA, KUNGEN TEII, SEIGO TAKASHIMA, MASARU HORI, TOSHIO GOTO (Dept. of Quantum Eng., Nagoya Univ., JAPAN), NOBUO ISHII (Tokyo Elec. Ltd., JAPAN)

ETP.058 Determination of quenching coefficients of rare-gases in a hydrogen RF discharge by time resolved emission spectroscopy

T. Gans, V. Schulz-von der Gathen, H.F. Döbele (Institut für Laser- und Plasmaphysik, Universität Essen, Germany)

ETP.059 Emission and Electrical Measurements to Assess Actinometry in SF6/Ar/O2 SiC Etching Discharges

Michael Brown (Innovative Scientific Solutions, Inc., Dayton, OH), James Scofield, Biswa Ganguly (Air Force Research Laboratory, Wright-Patterson AFB, OH)

ETP.060 VUV and Optical Emission Characterization of Fluorocarbon SiO_2 Etch Processes and Correlation to Etch Feature Quality

H. Hsueh, E. Dandapani, R. McGrath, R. Messier (Penn State University), B. Ji, E. Karwacki (Air Products and Chemicals, Inc.)

ETP.061 Laser absorption spectroscopy of a pulsed inductively coupled plasma in Ar and CF_4/Ar

N. Itazu, Y. Miyoshi, T. Makabe (Department of Electronics and Electrical Engineering,Keio University at Yokohama, Japan)

ETP.062 Atomic nitrogen and oxygen density measurements in low-pressure dc discharge

M. A. Bratescu, Y. Sakai, T. Kamada (Hokkaido University, Sapporo 060-8628 Japan)

ETP.063 Spatial distribution of excited C and Ar concentration in laser ablation carbon plume in Ar filling gas

M. A. Bratescu, Y. Sakai, Y. Suda, M. Mizuno (Hokkaido University, Sapporo 060-8628 Japan)

ETP.064 Application of Laser Thomson Scattering Diagnostics to a Micro-Discharge for a Plasma Display Panel

Y. Noguchi, A. Matsuoka, M. D. Bowden, K. Uchino, K. Muraoka (Kyushu University, Japan)

ETP.065 Challenges of Thomson scattering in molecular gas plasmas

C.E. Thompson, P.G. Steen, T. Morrow, W.G. Graham (Dept. of Pure and Applied Physics, The Queen's University of Belfast, Northern Ireland.)

ETP.066 Laser Scattering Diagnostics of a Microwave Discharge Plasma

S. Narishige, S. Suzuki, K. Uchino, K. Muraoka (Kyushu University, Japan), T. Sakoda (Kitakyushu Nat. Coll. Tech.)

ETP.067 He Metastable Density in a Double Layer Formed by a Diameter Discontinuity in a Positive Column

J. M. Williamson (Innovative Scientific Solutions, Inc., Dayton, OH), B. N. Ganguly (Air Force Research Laboratory, Wright-Patterson Air Force Base, OH)

ETP.068 Diagnostics of H^- and D^- in High-Density H_2 and D_2 Plasmas by Laser Photodetachment and Optical Emission Spectroscopy

H. Yamaguchi, K. Sasaki, K. Kadota (Department of Electronics, Nagoya University, Japan), M. Goto, S. Morita, K. Kawahata (National Institute for Fusion Science, Japan)

ETP.069 Modeling of relaxation phenomena after photodetachment in RF SiH4 discharges

Min Yan, Annemie Bogaers, Renaat Gijbels (Department of Chemistry, University of Antwerp, Belgium), Wim Goedheer (FOM-Institute for Plasma Physics, The Netherlands), Plasma Simulation Team, Modeling of low temperature plasma Collaboration

ETP.070 Investigations on Electric Field Distributions in a Microwave Discharge in Hydrogen

D. Luggenhölscher, U. Czarnetzki, H.F. Döbele (Institut für Laser- und Plasmaphysik, Universität GH Essen, D-45117, Germany)

ETP.071 Measurements of molecular radical densities in a CF_4 capacitively coupled RF-discharge

P. Fendel, A. Francis, U. Czarnetzki, H.F. Döbele (Institut für Laser- und Plasmaphysik, Universität GH Essen, D-45117, Germany)

ETP.072 Time resolved diagnostics in CF_4 / H_2 plasmas by electron attachment mass spectrometry and optical emission spectroscopy.

Hans-Erich Wagner, Juergen Meichsner, Valja Kroutilina, Rene Lerch (Institut f\ddot\mboxur Physik,\ddot\mboxat, 17487 Greifswald,), Low Temperature Plasma Physics and Chemistry Team (Institute of Physics, University of Greifswald)

ETP.073 Diagnostics of the Single Filament Barrier Discharge in Air by Cross-Correlation Spectroscopy

Hans-Erich Wagner, Ronny Brandenburg (Affiliation), Peter Michel (Institute of Physics, Ernst-Moritz-Arndt University of Greifswald, 17489 Greifswald, Domstr. 10a, Germany), Kirill V. Kozlov (Moscow State University, Department of Chemistry, 119899 Moscow, Russia), Low Temperature Plasma Physics and Chemistry Collaboration