Session 7P - Plasma Applications and Plasma Technology.
POSTER session, Thursday morning, November 14
Exhibit Hall - Concourse Level, Adam's Mark
A low-pressure argon microwave discharge, created and sustained by a surface wave, using a partial-coaxial cavity resonator has been studied. The 2.45GHz microwaves propagated through a 77D-coaxial waveguide are introduced circularly into the circumferential side of a dielectric disk ( a Pyrex glass of 10mm thickness and 52mm diameter ), which is set at the terminal of the cavity resonator. One flat surface of the disk is in contact with an inner conductor, and the other is coverd with the holey plate of 0.1mm thickness and 1.3mm diameter with 67transparency. Then, an evanescent electric field, that is, standing surface-wave is radiated from holey plate to the plasma production chamber of 40mm diameter. This source produces a plasma which is well matched, stable, and can operate continuously at argon gas pressure of 0.04 to 10Pa using a microwave power of 50W. The ion current density with holey plate was about 1.5 times as high as that without holey plate, that is, a dielectric disk on ground plane structure. The design of this source will be discussed including means for achieving high plasma density. Moreover, advantages over other sources will be discussed.