Session 7P - Plasma Applications and Plasma Technology.
POSTER session, Thursday morning, November 14
Exhibit Hall - Concourse Level, Adam's Mark
Collisionless electron heating is the dominant heating mechanism in low-density inductively coupled discharges. It can be described quantitatively in terms of the surface impedance. The standard theoretical model is to assume that the height of the system L is infinite. When compared with the particle simulations[M. M. Turner, Phys. Rev. Lett. 71, 1844(1993)], this model is found to be valid for \delta_a << L. Here, \delta_a is the anomalous skin depth. In particle simulations, the surface impedance deviates and reduced significantly from the standard theoretical model when \delta_a < L. A kinetic theory is developed to allow L to be finite. The novel effect associated with the finite height L is the bounce resonance between the bounce motion and the wave frequency. The results of the theory are in agreement with the particle simulations.